JPS61186230U - - Google Patents

Info

Publication number
JPS61186230U
JPS61186230U JP7168785U JP7168785U JPS61186230U JP S61186230 U JPS61186230 U JP S61186230U JP 7168785 U JP7168785 U JP 7168785U JP 7168785 U JP7168785 U JP 7168785U JP S61186230 U JPS61186230 U JP S61186230U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer
thicker
periphery
center
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7168785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7168785U priority Critical patent/JPS61186230U/ja
Publication of JPS61186230U publication Critical patent/JPS61186230U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP7168785U 1985-05-13 1985-05-13 Pending JPS61186230U (US06653308-20031125-C00199.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7168785U JPS61186230U (US06653308-20031125-C00199.png) 1985-05-13 1985-05-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7168785U JPS61186230U (US06653308-20031125-C00199.png) 1985-05-13 1985-05-13

Publications (1)

Publication Number Publication Date
JPS61186230U true JPS61186230U (US06653308-20031125-C00199.png) 1986-11-20

Family

ID=30609406

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7168785U Pending JPS61186230U (US06653308-20031125-C00199.png) 1985-05-13 1985-05-13

Country Status (1)

Country Link
JP (1) JPS61186230U (US06653308-20031125-C00199.png)

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