JPS61183962U - - Google Patents

Info

Publication number
JPS61183962U
JPS61183962U JP6686085U JP6686085U JPS61183962U JP S61183962 U JPS61183962 U JP S61183962U JP 6686085 U JP6686085 U JP 6686085U JP 6686085 U JP6686085 U JP 6686085U JP S61183962 U JPS61183962 U JP S61183962U
Authority
JP
Japan
Prior art keywords
chamber
furnace body
gas
reaction chamber
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6686085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6686085U priority Critical patent/JPS61183962U/ja
Publication of JPS61183962U publication Critical patent/JPS61183962U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
JP6686085U 1985-05-08 1985-05-08 Pending JPS61183962U (US08063081-20111122-C00044.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6686085U JPS61183962U (US08063081-20111122-C00044.png) 1985-05-08 1985-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6686085U JPS61183962U (US08063081-20111122-C00044.png) 1985-05-08 1985-05-08

Publications (1)

Publication Number Publication Date
JPS61183962U true JPS61183962U (US08063081-20111122-C00044.png) 1986-11-17

Family

ID=30600149

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6686085U Pending JPS61183962U (US08063081-20111122-C00044.png) 1985-05-08 1985-05-08

Country Status (1)

Country Link
JP (1) JPS61183962U (US08063081-20111122-C00044.png)

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