JPS61183896A - High frequency induction plasma torch - Google Patents

High frequency induction plasma torch

Info

Publication number
JPS61183896A
JPS61183896A JP2418285A JP2418285A JPS61183896A JP S61183896 A JPS61183896 A JP S61183896A JP 2418285 A JP2418285 A JP 2418285A JP 2418285 A JP2418285 A JP 2418285A JP S61183896 A JPS61183896 A JP S61183896A
Authority
JP
Japan
Prior art keywords
torch
gas
circular tube
plasma
tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2418285A
Other languages
Japanese (ja)
Inventor
太 水谷
豪太郎 田中
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sumitomo Electric Industries Ltd
Original Assignee
Sumitomo Electric Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sumitomo Electric Industries Ltd filed Critical Sumitomo Electric Industries Ltd
Priority to JP2418285A priority Critical patent/JPS61183896A/en
Publication of JPS61183896A publication Critical patent/JPS61183896A/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。
(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【発明の詳細な説明】 〈産業上の利用分野〉 この発明は高周波誘導プラズマを発生せしめるトーチに
関し、特に安定なプラズマを簡便な装置で実現せしめよ
うとするものである。
DETAILED DESCRIPTION OF THE INVENTION <Industrial Application Field> The present invention relates to a torch that generates high-frequency induced plasma, and particularly aims to realize stable plasma with a simple device.

〈従来の技術とその問題点〉 従来から高周波誘導プラズマを発生させる容器として石
英ガラスあるいはその他の耐火材よりなる多重管(以下
これをトーチと称す)が用いられている。
<Prior art and its problems> Conventionally, a multi-tube (hereinafter referred to as a torch) made of quartz glass or other refractory material has been used as a container for generating high-frequency induced plasma.

第5図が既存のトーチの一例である。FIG. 5 shows an example of an existing torch.

このタイプのトーチは石英ガラス管21.22を溶着す
ることによりトーチ23構造とするもので、耐熱性、耐
紫外線性にすぐれている。
This type of torch has a torch 23 structure by welding quartz glass tubes 21 and 22, and has excellent heat resistance and ultraviolet resistance.

しかしながら、トーチ23の中央にプラズマ24を安定
に発生せしめるためには、ガス導入用枝管25より石英
ガラス管21.22の間隙に導かれたガスの流れをプラ
ズマ発生個所の周辺で円周方向に均一なものとすること
が必要であり、このために一般には石英ガラス管の筒4
長を長くする方法がとられ°ている。
However, in order to stably generate the plasma 24 at the center of the torch 23, it is necessary to direct the gas flow introduced from the gas introduction branch pipe 25 into the gap between the quartz glass tubes 21 and 22 in the circumferential direction around the plasma generation point. It is necessary to have a uniform surface, and for this purpose, generally a quartz glass tube 4 is used.
Measures are being taken to increase the length.

ところが筒長の長いものはど溶着の寸法精度を出しにく
いため、このタイプの石英ガラス管ではプラズマを安定
に維持できるトーチは得にくいという欠点があった。
However, since it is difficult to achieve dimensional accuracy for welding with long tubes, this type of quartz glass tube has the disadvantage that it is difficult to obtain a torch that can stably maintain plasma.

また、石英ガラスは高価であるので、使用中にプラズマ
により損傷を受けたときには、その部位を修理して再使
用することになるが、この修理で寸法精度を出すのは新
規品の作製時よりさらに難しく、加工費が割高となるこ
と、さらに同じ理由から再生回数が少ないことでコスト
面でも問題があった。
Also, since quartz glass is expensive, if it is damaged by plasma during use, the damaged part must be repaired and reused, but dimensional accuracy is achieved through this repair compared to when manufacturing a new product. It was even more difficult and expensive to process, and for the same reason, the number of times it could be played was small, which caused problems in terms of cost.

上記のタイプの欠点に鑑み、トーチとしての多重管構造
を複数の円管26.27.28を組立てることによって
得る第6図に示すようなタイプのトーチが考案されてい
る。
In view of the drawbacks of the above-mentioned types, a torch of the type shown in FIG. 6 has been devised, which has a multi-tube structure as a torch by assembling a plurality of circular tubes 26, 27, 28.

このタイプでは、組立てに円筒同志の溶着を要しないた
め、製造コストを低減でき、またざらにプラズマにより
損傷を受けた場合にも該当部品を交換するだけですみ、
トーチの保守が簡単であるという利点を有する。
This type does not require welding the cylinders together during assembly, which reduces manufacturing costs, and even if the parts are damaged by plasma, all you have to do is replace the relevant parts.
It has the advantage that the torch is easy to maintain.

しかしながら、組立てにおいて、ガス導入口29.29
′からみて、プラズマを発生させる側とは逆の円管の端
部のみでガスのリークを抑え、かつ円管をスペーサ32
.32で固定するので、筒長31を長くするほど開口端
での同心度を得ることが難しく、第5図のタイプと同様
の欠点を有している。
However, during assembly, the gas inlet 29.29
′, gas leakage is suppressed only at the end of the circular tube opposite to the side where plasma is generated, and the circular tube is connected to the spacer 32.
.. 32, the longer the tube length 31 is, the more difficult it is to obtain concentricity at the open end, which has the same drawback as the type shown in FIG.

上述の欠点に鑑みて、本発明者らは従来の組立て型トー
チに加えて第7図に示すようなガス導通のための溝33
をトーチ軸と平行に設けたスペーサ34をガス導入口か
ら開口端までの間に挟んで組立てる方式を考案し、試験
した。
In view of the above-mentioned drawbacks, the inventors have developed a groove 33 for gas communication as shown in FIG. 7 in addition to the conventional prefabricated torch.
A method was devised and tested in which a spacer 34 provided parallel to the torch axis was sandwiched between the gas inlet and the open end.

これにより、真直度および同心度のよい円管を用いるこ
とでトーチの間隙の寸法精度±0.1面を得ることがで
きた。
As a result, by using a circular tube with good straightness and concentricity, it was possible to obtain a dimensional accuracy of ±0.1 for the gap between the torches.

しかしながら、このトーチにガスを導入し、プラズマを
発生させると、スペーサの溝の壁35によりガス流の円
筒方向の均一が乱されて安定にプラズマを維持すること
ができなかった。
However, when gas is introduced into this torch and plasma is generated, the uniformity of the gas flow in the cylindrical direction is disturbed by the groove walls 35 of the spacer, making it impossible to stably maintain the plasma.

〈問題点を解決するための手段〉 この発明は、従来の組立て型トーチに改良を施し、上述
の欠点を解消して組立て型が本来有する低廉性、保守の
簡便性を損なうことなく組立時の同心度を改善し、安定
な高周波誘導プラズマを発生せしめ1専るトーチを提供
することを目的とするものである。
<Means for Solving the Problems> The present invention improves the conventional assembly type torch, eliminates the above-mentioned drawbacks, and improves the assembly time without sacrificing the inherent low cost and ease of maintenance of the assembly type. The purpose of this invention is to provide a torch that improves concentricity and generates stable high-frequency induced plasma.

即ち、この発明は一方端にガス導入口を有する石英管よ
りなる中心円管の外側に、該中心円管の前記ガス導入口
を有する一方端付近にガス導入口を有する石英管よりな
る1つ以上の円管を、該円管同志の間隙に螺旋状のガス
導通部を一つ以上有する耐熱材からなるスペーサを挟着
して嵌合したことを特徴とするトーチである。
That is, the present invention provides a central circular tube made of a quartz tube having a gas inlet at one end, and a tube made of a quartz tube having a gas inlet near one end of the central circular tube having the gas inlet at one end thereof. This torch is characterized in that the above-mentioned circular tubes are fitted with a spacer made of a heat-resistant material having one or more spiral gas conduction parts sandwiched between the circular tubes.

〈作用〉 要するに、この発明のトーチは第6図の組立て型トーチ
に加えてカス導入口よりプラズマ発生部までの間隙にス
ペーサを設け、かつこのスペーサにガス流に円周方向の
速度を与えるような形状を持たせることを主構成とする
ものである。
<Function> In short, the torch of the present invention is provided with a spacer in the gap from the waste inlet to the plasma generation part in addition to the assembled torch shown in FIG. The main structure is to have a shape.

〈実施例〉 以下、この発明をその一実施例を示す図面に基づいて説
明する。
<Example> Hereinafter, the present invention will be described based on drawings showing one example thereof.

第1図は1.2.3の3種の円管よりなる3重管構造の
場合のこの発明のトーチの一例である。
FIG. 1 is an example of the torch of the present invention in the case of a triple tube structure consisting of three types of circular tubes as shown in 1.2.3.

中心円管1は一方端にガス導入口4G:有している。The central circular tube 1 has a gas inlet 4G at one end.

そしてこの中心円管1の外側に順に第2円管2と第3円
管3を配置し、第2図に示すような螺旋状のガス導通部
5を有するスペーサ6.6′とガス閉止用スペーサ7.
7′をそれぞれ用いてこれらを固定する。
A second circular tube 2 and a third circular tube 3 are arranged in order outside this central circular tube 1, and a spacer 6.6' having a spiral gas conduction part 5 as shown in FIG. Spacer 7.
7' to fix these.

第2円管のガス導入口8.8′および第3円管3のガス
導入口9.9′はそれぞれの円管2.3の内側のガラス
閉止用スペーサ7および7′よりも開口端側の円管側面
に設けられている。
The gas inlet 8.8' of the second circular tube and the gas inlet 9.9' of the third circular tube 3 are closer to the open end than the glass closing spacers 7 and 7' inside the respective circular tubes 2.3. It is provided on the side of the circular tube.

この例では石英ガラスの枝管10を中心円管1の一方端
に溶着してガス導入口4としているが、この発明におい
ては、ガス閉止用スペーサとガス導入口は円管同志の間
隙の片端を相互の同心を保って封じ、かつこの間隙にガ
スを導入するような構造を持っていればよい。
In this example, a quartz glass branch pipe 10 is welded to one end of the central circular tube 1 to form the gas inlet 4, but in this invention, the gas closing spacer and the gas inlet are provided at one end of the gap between the circular tubes. It suffices to have a structure that allows the gaps to be sealed while keeping them concentric with each other, and to introduce gas into this gap.

また、上記両者の後側をあわせ持った方式、あるいはざ
らに螺旋状ガス導通部5にガス導入口4からガスを流す
役割のスペーサ6を円管1に挿入する第4図のような方
式も、トーチ寸法により採用され得る。
In addition, there is also a method in which the rear sides of both of the above are combined, or a method as shown in FIG. 4 in which a spacer 6 is inserted into the circular pipe 1 to allow gas to flow from the gas inlet 4 to the roughly spiral gas conduction portion 5. , depending on the torch dimensions.

また、螺旋状のガス導通部5は第2図のような複数の螺
旋状導通溝を持つものに限らず、螺旋状のスペー勺6′
を円管1に嵌合するような第3図に示ずような方式も間
隙が狭い場合等に用いられる。
Further, the spiral gas conduction portion 5 is not limited to the one having a plurality of spiral conduction grooves as shown in FIG.
A method as shown in FIG. 3, in which the tube 1 is fitted into the circular tube 1, is also used when the gap is narrow.

スペーサの材質は各々の間隙に流すガスおるいは液体、
固体の種類、発生させるプラズマよりの輻射加熱および
紫外線強度の影響、必要な形状、寸法に対する加工性、
ガスのシール性および高純度プロセスの場合に汚染源と
なるようなガスを発生しないこと、などの化学的安定性
などを考慮して決定すればよい。
The material of the spacer is the gas or liquid flowing into each gap,
The type of solid, the effects of radiation heating from the generated plasma and the intensity of ultraviolet rays, the required shape and processability for dimensions,
It may be determined by taking into consideration chemical stability such as gas sealing performance and not generating gas that may become a source of contamination in the case of high-purity processes.

一例としてプラズマプロセスにより高純度の純石英ガラ
スを合成するのに用いられる第1図のタイプについて説
明する。
As an example, the type shown in FIG. 1, which is used to synthesize high-purity pure silica glass by a plasma process, will be explained.

中心円管1にはプラズマガスとしてのアルゴンガスと石
英ガラスの原料である4塩化珪素等を導入する。
Argon gas as a plasma gas and silicon tetrachloride as a raw material for quartz glass are introduced into the central circular tube 1.

中心円管1と第2円管2との間隙および第2円管2と第
3円管3の間隙には酸化反応用あるいはトーチ冷却用ガ
スとして酸素ガス、アルゴンガス、窒素ガスなどを流す
Oxygen gas, argon gas, nitrogen gas, or the like is passed through the gap between the central circular tube 1 and the second circular tube 2 and the gap between the second circular tube 2 and the third circular tube 3 as a gas for oxidation reaction or for cooling the torch.

トーチの形状、寸法は誘導プラズマ全般において、発生
させるプラズマの性質、出力により決定される。
The shape and dimensions of the torch are determined by the properties and output of the plasma to be generated in general for induced plasma.

この例では必要なガラス合成量により最適化が図られる
が、おおむね数KW以上の出力を要するのであまり開口
端の近くにスペーサを配すると、プラズマからの熱輻射
および紫外線により変形や変質を招き易くなる。
In this example, optimization is attempted depending on the amount of glass synthesis required, but since the output is approximately several kilowatts or more, placing the spacer too close to the opening end may easily lead to deformation or deterioration due to heat radiation from the plasma and ultraviolet rays. Become.

この観点からスペーサにフッ素樹脂を用いる時には、開
口端から充分に離す必要があり、その余裕のない場合に
はワークコイル(図示せず)からの誘導加熱を考慮した
うえ、金属材やセラミック材のものを用いることが好ま
しい。
From this point of view, when using fluororesin for the spacer, it is necessary to keep it sufficiently away from the opening end, and if there is not enough space, consider induction heating from the work coil (not shown), and use metal or ceramic materials. It is preferable to use

−例としては、プラズマ出力が5KW、また間隙が各々
2mでスペーサ6.6′として4フツ化エチレンリング
に螺旋状の溝を切ったものをプラズマ明光部の底から3
 cm以上離した状態で使用できる。
- As an example, the plasma output is 5KW, the gap is 2m each, and the spacer 6.6' is a tetrafluoroethylene ring with a spiral groove cut 30cm from the bottom of the plasma bright area.
Can be used at a distance of at least 1 cm.

また、ガス閉止用スペーサ7.7′ははフッ素樹脂リン
グを用い、ガス導入口4.8.8′、9.9′としては
、夫々の円管1.2.3に石英管を溶着した。
In addition, a fluororesin ring was used as the gas closing spacer 7.7', and quartz tubes were welded to the respective circular tubes 1.2.3 as the gas inlet ports 4.8.8' and 9.9'. .

この方式では間隙の円周方向変動を円管の全長にわたり
、±O,is以内に抑えることが容易なので、第5図に
示した一体型および第6図に示した片端のみ固定の組立
て型では得がたかった寸法精度の維持が簡単で、かつガ
ス流に円周方向の速度を与えるので流速の同方向の分布
の均一性を向上せしめながら、プラズマを安定維持せし
めるガス流を形成せしめることができる。
With this method, it is easy to suppress the variation in the circumferential direction of the gap within ±O,is over the entire length of the circular tube, so the integral type shown in Figure 5 and the assembled type with only one end fixed as shown in Figure 6 are It is easy to maintain the dimensional accuracy that has been difficult to obtain, and since it gives the gas flow velocity in the circumferential direction, it is possible to form a gas flow that maintains the plasma stably while improving the uniformity of the flow velocity distribution in the same direction. can.

〈発明の効果〉 以上詳述したように、この発明によれば寸法精度の良好
な、かつプラズマを安定維持するのに適したガス流を形
成するトーチを得ることが容易にできるので、安価に所
要のプラズマを安定に発生でき、その効果は大でおる。
<Effects of the Invention> As detailed above, according to the present invention, it is possible to easily obtain a torch with good dimensional accuracy and which forms a gas flow suitable for stably maintaining plasma, so it can be obtained at low cost. The required plasma can be stably generated, and the effect is great.

【図面の簡単な説明】[Brief explanation of the drawing]

第1図はこの発明に係るトーチの構造の一例を示す説明
図、第2図はこの発明で用いる螺旋状ガス導通部を有す
るスペーサの一例を示す概略図、第3図は螺旋状スペー
サを挿入したトーチの概略図、第4図は螺旋状ガス導通
部を有するスペーサに円管を挿入する状態を示す説明図
、第5図は従来の一体型トーチの概略図、第6図は従来
の組立て型トーチの一例を示す概略図、第7図は従来の
スペーサの一形状を示す概略図である。 1・・・中心円管    2・・・第2円管3・・・第
3円管    4・・・ガス導入口5・・・ガス導通部
   6.6′、6“・・・スペーサ7.7′・・・ガ
ス閉止用スペーサ 8.8′・・・ガス導入口  9.9′・・・ガス導入
口10・・・枝管
FIG. 1 is an explanatory diagram showing an example of the structure of a torch according to the present invention, FIG. 2 is a schematic diagram showing an example of a spacer having a spiral gas conduction part used in the present invention, and FIG. Fig. 4 is an explanatory diagram showing a state in which a circular tube is inserted into a spacer having a spiral gas conduction portion, Fig. 5 is a schematic diagram of a conventional integrated torch, and Fig. 6 is a conventional assembly. FIG. 7 is a schematic diagram showing an example of a mold torch, and FIG. 7 is a schematic diagram showing one shape of a conventional spacer. 1... Central circular tube 2... Second circular tube 3... Third circular tube 4... Gas inlet 5... Gas conduction part 6.6', 6''... Spacer 7. 7'...Spacer for gas closure 8.8'...Gas inlet 9.9'...Gas inlet 10...Branch pipe

Claims (2)

【特許請求の範囲】[Claims] (1)一方端にガス導入口を有する石英管よりなる中心
円管の外側に、該中心円管の前記ガス導入口を有する一
方端付近にガス導入口を有する石英管よりなる1つ以上
の円管を、該円管同志の間隙に螺旋状のガス導通部を一
つ以上有する耐熱材からなるスペーサを挟着して嵌合し
たことを特徴とする高周波誘導プラズマ用トーチ。
(1) On the outside of a central circular tube made of a quartz tube having a gas inlet at one end, one or more quartz tubes having a gas inlet near one end of the central circular tube have the gas inlet. A torch for high-frequency induced plasma, characterized in that circular tubes are fitted with a spacer made of a heat-resistant material having one or more spiral gas conduction parts in the gap between the circular tubes.
(2)中心円管の一方端のガス導入口を石英ガラス製枝
管を溶着して設けることを特徴とする特許請求の範囲第
1項記載の高周波誘導プラズマ用トーチ。
(2) The torch for high-frequency induced plasma according to claim 1, wherein the gas inlet at one end of the central circular tube is provided by welding a branch tube made of quartz glass.
JP2418285A 1985-02-09 1985-02-09 High frequency induction plasma torch Pending JPS61183896A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2418285A JPS61183896A (en) 1985-02-09 1985-02-09 High frequency induction plasma torch

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2418285A JPS61183896A (en) 1985-02-09 1985-02-09 High frequency induction plasma torch

Publications (1)

Publication Number Publication Date
JPS61183896A true JPS61183896A (en) 1986-08-16

Family

ID=12131192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2418285A Pending JPS61183896A (en) 1985-02-09 1985-02-09 High frequency induction plasma torch

Country Status (1)

Country Link
JP (1) JPS61183896A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6358799A (en) * 1986-08-28 1988-03-14 日本高周波株式会社 Radio frequency plasma reactor in which reaction sample jetting part is inserted into plasma flame
JPH01159350U (en) * 1988-04-22 1989-11-06
JP2009510670A (en) * 2005-09-02 2009-03-12 パーキンエルマー・インコーポレイテッド Induction device for plasma generation
JP2010140697A (en) * 2008-12-10 2010-06-24 Jeol Ltd High-frequency induction thermal plasma device
JP2012116689A (en) * 2010-11-30 2012-06-21 Hoya Corp Method of manufacturing glass preform for precise press molding, and method of manufacturing optical device
JP2012116687A (en) * 2010-11-30 2012-06-21 Hoya Corp Method of manufacturing glass preform for precise press molding, and method of manufacturing optical device
JP2012116688A (en) * 2010-11-30 2012-06-21 Hoya Corp Method of manufacturing glass preform for precise press molding, and method of manufacturing optical device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6358799A (en) * 1986-08-28 1988-03-14 日本高周波株式会社 Radio frequency plasma reactor in which reaction sample jetting part is inserted into plasma flame
JPH01159350U (en) * 1988-04-22 1989-11-06
JP2009510670A (en) * 2005-09-02 2009-03-12 パーキンエルマー・インコーポレイテッド Induction device for plasma generation
JP2010140697A (en) * 2008-12-10 2010-06-24 Jeol Ltd High-frequency induction thermal plasma device
JP2012116689A (en) * 2010-11-30 2012-06-21 Hoya Corp Method of manufacturing glass preform for precise press molding, and method of manufacturing optical device
JP2012116687A (en) * 2010-11-30 2012-06-21 Hoya Corp Method of manufacturing glass preform for precise press molding, and method of manufacturing optical device
JP2012116688A (en) * 2010-11-30 2012-06-21 Hoya Corp Method of manufacturing glass preform for precise press molding, and method of manufacturing optical device

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