JPS61177449A - Photosensitive resin composition - Google Patents

Photosensitive resin composition

Info

Publication number
JPS61177449A
JPS61177449A JP1865185A JP1865185A JPS61177449A JP S61177449 A JPS61177449 A JP S61177449A JP 1865185 A JP1865185 A JP 1865185A JP 1865185 A JP1865185 A JP 1865185A JP S61177449 A JPS61177449 A JP S61177449A
Authority
JP
Japan
Prior art keywords
ethylenically unsaturated
unsaturated bond
epoxy
resin composition
carboxylic acid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1865185A
Other languages
Japanese (ja)
Inventor
Katsue Masui
増井 克江
Norimoto Moriwaki
森脇 紀元
Torahiko Ando
虎彦 安藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP1865185A priority Critical patent/JPS61177449A/en
Publication of JPS61177449A publication Critical patent/JPS61177449A/en
Pending legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/038Macromolecular compounds which are rendered insoluble or differentially wettable
    • G03F7/0388Macromolecular compounds which are rendered insoluble or differentially wettable with ethylenic or acetylenic bands in the side chains of the photopolymer
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/0073Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces
    • H05K3/0076Masks not provided for in groups H05K3/02 - H05K3/46, e.g. for photomechanical production of patterned surfaces characterised by the composition of the mask
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K3/00Apparatus or processes for manufacturing printed circuits
    • H05K3/10Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
    • H05K3/18Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
    • H05K3/181Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
    • H05K3/182Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method
    • H05K3/184Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating characterised by the patterning method using masks

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Epoxy Resins (AREA)

Abstract

PURPOSE:To obtain the titled composition capable of enduring to conditions of an electroless copper plating by incorporating a reaction product of a carboxylic acid having an ethylenically unsaturated bond and an epoxy resin, a thermoplastic resin, a compd. contg. an ethylenically unsaturated bond or an epoxy group, a photopolymerization initiator, a thermocuring catalyst, a solvent and a coloring to the titled composition. CONSTITUTION:The titled composition comprises the reaction product of the carboxylic acid contg. the ethylenically unsaturated bond and the epoxy resin, the thermoplastic resin, the compd. contg. the ethylenically unsaturated bond or the epoxy group, the photopolymerization initiator, the thermocuring catalyst, the solvent and the coloring matter to the titled composition. The preferable carboxylic acid contg. the ethylenically unsaturated bond is an acrylic acid, a methacrylic acid etc. By applying the titled composition, the plating resist pattern having the fine pattern can be formed by a photographic method. As said plating resist has the resistance for the heated electro copper plating solution, the printed board having the fine pattern can be cheaply prepared by a full-additive process.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、基板に塗布後、ネガマスクを通して光を照射
し、有機溶媒で現偉しパターンを形成した後焼成するこ
とによって完全な重合化被膜を形成し得る、感光性樹脂
組成物に関するものである。
[Detailed Description of the Invention] [Field of Industrial Application] The present invention is capable of forming a complete polymerized film by coating a substrate, irradiating it with light through a negative mask, forming a pattern with an organic solvent, and then baking it. The present invention relates to a photosensitive resin composition capable of forming.

〔従来の技術〕[Conventional technology]

従来、プリント配線板の製造法としては、銅張り積層板
の不要銅箔部分をエツチングすることにより除去するサ
ブトラクティブ法が主体であった句C り、銅箔のエツチングの無駄をな(し低コストでプリン
ト配線板を製造すること、またスルー・ホールの信頼性
を増す目的で、必要な導体パターン部分のみを無電解銅
メッキによって付加するアディティブ法が開発されてき
た。
Conventionally, the main method for producing printed wiring boards has been the subtractive method, in which unnecessary copper foil parts of copper-clad laminates are removed by etching. In order to manufacture printed wiring boards at low cost and to increase the reliability of through-holes, an additive method has been developed in which only the necessary conductor pattern parts are added by electroless copper plating.

このアディティブ法としては、基板を穴あけした後全面
活性化処理した基板、または触媒入り基板にメツキレシ
ストを印刷し、必要な導体パターンを無電解鋼メッキの
みにより付加するフル・アディティブ法、全面に無電解
鋼メッキをし、メツキレシストを印刷し電気メツキ法に
より必要な導体パターンを形成した後、メツキレシスト
の導体パターン部分以外の無電解鋼メッキを除去するセ
ミ・アディティブ法、および銅張り積層板を用いスルー
・ホール部分を無電解鋼メッキを用いて形成するバート
リー・アディティブ法が行なわれている。
This additive method includes a fully additive method in which a hole is drilled in the board and then the entire surface is activated, or a catalyst-containing board is printed with a metal resist, and the necessary conductor pattern is added only by electroless steel plating. After plating steel, printing a metal resist, and forming the necessary conductor pattern by electroplating, we use a semi-additive method to remove the electroless steel plating other than the conductor pattern portion of the metal resist, and a through-plating method using a copper-clad laminate. The Bartley additive method is used to form the hole using electroless steel plating.

〔発明が解決しようとする間句点〕[The pause that the invention attempts to solve]

このアディティブ法において、一般にメツキレシストパ
ターンの形成は、レジストインクをスクリーン印刷する
ことによってなされているが、スクリーン印刷法で形成
し得る最小パターン幅は二〇〇μ扉程度であり、これ以
上のファインパターン形成はフォトレジストを用いる写
真法によってなされる必要がある。しかし、現在市販さ
れているプリント基板製造用のフォトレジストはほとん
どがアクリル系であるため加水分解反応を受けやすく、
高温、高塩基性条件下の無電解銅メッキに耐えるもので
はない。
In this additive method, the formation of the resist pattern is generally done by screen printing resist ink, but the minimum pattern width that can be formed using the screen printing method is about 200 μm, and Fine pattern formation must be performed by a photographic method using a photoresist. However, most of the photoresists currently on the market for manufacturing printed circuit boards are acrylic-based, so they are susceptible to hydrolysis reactions.
It does not withstand electroless copper plating under high temperature, highly basic conditions.

本発明は上記のような問題点を解決するためになされた
もので、ファインパターンを写真法によって形成できる
とともに、無電解銅メッキ条件に耐え得る感光性樹脂組
成物を得ることを目的とするO 酸とエポキシ樹脂との反応生成物、熱可塑性樹脂、エチ
レン性不飽和結合またはエポキシ基を有する化合物、光
重合開始剤、熱硬化触媒、溶剤及び着色剤から成る感光
性樹脂組成物に存する。
The present invention was made in order to solve the above-mentioned problems, and aims to provide a photosensitive resin composition that can form fine patterns by photographic methods and that can withstand electroless copper plating conditions. A photosensitive resin composition comprising a reaction product of an acid and an epoxy resin, a thermoplastic resin, a compound having an ethylenically unsaturated bond or an epoxy group, a photopolymerization initiator, a thermosetting catalyst, a solvent, and a colorant.

〔作 用〕[For production]

本発明による感光性樹脂組成物を用いてパターンを形成
するには、感光性樹脂組成物を基板上によって重合を完
全にすることにより行なう。
In order to form a pattern using the photosensitive resin composition according to the present invention, the photosensitive resin composition is completely polymerized on a substrate.

すなわち、本発明における感光性樹脂組成物をガラス・
エポキシ積層板、ガラス・ポリイミド積層板等のプリン
ト基板製造に使用される基板上に塗布し、ネガマスクを
密着して紫外光を照射するために適した状態まで乾燥し
た後、所定のネガマスクを通して光を照射し、その後残
存している溶媒を加熱により完全に除去した後、有機温
媒によって現像を行ない、次いで焼成を行なうことによ
って、耐無電解銅メッキ液性を有するメツキレシストパ
ターンを形成するものである。
That is, the photosensitive resin composition of the present invention is
It is applied onto substrates used for manufacturing printed circuit boards such as epoxy laminates and glass/polyimide laminates, and after drying to a state suitable for irradiation with ultraviolet light by adhering a negative mask, the light is irradiated through a designated negative mask. After irradiation, the remaining solvent is completely removed by heating, development is performed using an organic heating medium, and then baking is performed to form a metskire resist pattern that is resistant to electroless copper plating liquid. It is.

本発明で用いられる望ましいエチレン性の不飽和結合を
有するカルボン酸としては、アクリル酸。
The preferred carboxylic acid having an ethylenically unsaturated bond used in the present invention is acrylic acid.

メタクリル酸、等があげられる。Examples include methacrylic acid.

エポキシ樹脂としては、ビスフェノールA屋エポキシ樹
脂、クレゾールノボラック型エポキシ樹脂などのグリシ
ジルエーテル型エポキシ樹脂、グリシジルエステル型エ
ポキシ樹脂、グリシジルアミン型エポキシ樹脂、線状脂
肪族エポキシ樹脂、脂環式エポキシ樹脂、覆素環型エポ
キシ樹脂、ハロゲン化エポキシ樹脂等の分子中にコ個以
上のエポキシ基を有するエポキシ樹脂があげられる。こ
れらのエポキシ樹脂は1種類もしくはa糧類以上の混合
系で用いられる。特に望ましいものとして。
Epoxy resins include bisphenol A epoxy resins, glycidyl ether type epoxy resins such as cresol novolac type epoxy resins, glycidyl ester type epoxy resins, glycidylamine type epoxy resins, linear aliphatic epoxy resins, alicyclic epoxy resins, Examples include epoxy resins having 0 or more epoxy groups in the molecule, such as monocyclic epoxy resins and halogenated epoxy resins. These epoxy resins may be used alone or in a mixed system of more than one type. Especially as desirable.

クレゾールノボラック型エポキシ樹脂、フェノールノボ
ラック屋エポキシ樹脂があげられる。従って1本発明で
エチレン性の不飽和結合を有するカルボン酸とエポキシ
樹脂との反応生成物とは、好適にはアクリル(メタクリ
ル)化エポキシ樹脂C以下単にアクリル化エポキシ樹脂
という)である。
Examples include cresol novolac type epoxy resin and phenol novolac type epoxy resin. Therefore, in the present invention, the reaction product of a carboxylic acid having an ethylenically unsaturated bond and an epoxy resin is preferably an acrylic (methacrylated) epoxy resin (hereinafter simply referred to as an acrylated epoxy resin).

上記のエポキシ樹脂は比較的低分子量であるため、良好
なパターン解像度を得、最終的なフィルムの平滑性を与
え、耐熱電解鋼メッキ液性を得るため、分子量の大きい
熱可塑性樹脂が添加される。
Since the above epoxy resin has a relatively low molecular weight, a thermoplastic resin with a large molecular weight is added to obtain good pattern resolution, smoothness of the final film, and properties of the heat-resistant electrolytic steel plating solution. .

高分子量であり、耐薬品性のすぐれた熱可塑性樹脂とし
ては、ポリスルホン、ポリエーテルスルyjt7、フェ
ノキシ、ポリフェニレンオキサイド、ポリカーボネート
等があげられるが、このうちで特に望ましいものとして
は、比較的高分子量であり耐薬品性にすぐれ100℃以
上のガラス転移点を有するフェノキシまたはポリスルホ
ン樹脂があげられる。
Thermoplastic resins with high molecular weight and excellent chemical resistance include polysulfone, polyethersulfone, phenoxy, polyphenylene oxide, polycarbonate, etc. Among these, particularly desirable ones are those with relatively high molecular weight and excellent chemical resistance. Examples include phenoxy or polysulfone resins that have excellent chemical resistance and a glass transition point of 100°C or higher.

本発明の感光性樹脂組成物に使用される不飽和結合また
はエポキシ官能基を有する化合物は、好適にはエチレン
性の不飽和結合を7分子中に少なくとも1個以上含む液
状または半液状の化合物である。これらの化合物として
は、ポリエチレングリコールジアクリレート、トリメチ
ロールプロパントリアクリレートおよびトリス(コーア
クリロキシ)イソシアヌレートがあげられる。エポキシ
基を1分子中にコ個以上含む液徐°または半液象°の化
合物としては、液状のビスフェノールAmエポキシ樹脂
があげられる。
The compound having an unsaturated bond or an epoxy functional group used in the photosensitive resin composition of the present invention is preferably a liquid or semi-liquid compound containing at least one ethylenically unsaturated bond in seven molecules. be. These compounds include polyethylene glycol diacrylate, trimethylolpropane triacrylate and tris(co-acryloxy)isocyanurate. Liquid bisphenol Am epoxy resin is an example of a liquid or semi-liquid compound containing at least three epoxy groups in one molecule.

本発明において用いられる光重合開始剤としては、アン
トラキノン、コーメチルアントラキノン。
Photopolymerization initiators used in the present invention include anthraquinone and comethylanthraquinone.

コーエチルアントラキノン、コーt−ブチルアントラキ
ノン等のアントラキノン誘導体、ベンゾフェノン、アセ
トフェノン、ベンゾイン等のケトン類やミヒラーケトン
とベンゾフェノン、チオキサントンと芳香族アミン等の
混合系が用いられる。
Anthraquinone derivatives such as coethylanthraquinone and coated t-butylanthraquinone, ketones such as benzophenone, acetophenone, and benzoin, and mixtures of Michler's ketone and benzophenone, and thioxanthone and aromatic amines are used.

溶剤としては適当な流れ性を有し、組成物の固体成分を
溶解しうる性質のものが用いられる。溶剤の沸点は適度
な流れ性を有し、形成された被膜に泡が生じることを抑
えるような適当な揮発速度になるようなものが選ばれる
。適した溶剤としてハ、エチレンクリコールモノエチル
エーテル(セロソルブ)、エチレンクリコールモノメチ
ルエーテル(メチルセロソルブ)、エチレングリコール
モノエチルエーテルアセテート(セロソルブアセテート
)、エチレングリコールモノメチルエーテルアセテート
(メチルセロソルブアセテート)、キシレン、トルエン
、揮発速度の速い溶剤であるメチルエチルケトン、トリ
クレン、アセトン、および揮発速度の遅い溶剤であるブ
チルカルピトールなどがあげられ、これらの溶剤を必要
に応じて一種以上混合して用いてもよい。
The solvent used is one that has suitable flowability and is capable of dissolving the solid components of the composition. The boiling point of the solvent is selected so that it has appropriate fluidity and an appropriate volatilization rate to suppress the formation of bubbles in the formed film. Suitable solvents include ethylene glycol monoethyl ether (cellosolve), ethylene glycol monomethyl ether (methyl cellosolve), ethylene glycol monoethyl ether acetate (cellosolve acetate), ethylene glycol monomethyl ether acetate (methyl cellosolve acetate), xylene, Examples include toluene, methyl ethyl ketone, trichlene, acetone, which are solvents with a fast volatilization rate, and butylcarpitol, which is a solvent with a slow volatilization rate, and one or more of these solvents may be used as a mixture, if necessary.

着色剤としては、エチルバイオレット、クリスタルバイ
オレット、ビクトリアブルー、フタロシアニングリーン
のような緑〜青色の色素または顔料があげられる。
Coloring agents include green to blue dyes or pigments such as ethyl violet, crystal violet, Victoria blue, and phthalocyanine green.

熱硬化のための触媒としては、コーエチルーグメチルー
イミダゾール、/、lf−ジアゾ−ビシクロ〔5,弘、
O〕ウンデセンーク(DBU)、弘、l−メチレンジア
ニリン、N、N、!(、hr −テトラメチル−t、3
−ブタンジアミン等のアミン類があげられる。
Catalysts for thermal curing include coechyl-gmethyl-imidazole, /, lf-diazo-bicyclo [5, Hiroshi,
O] Undesenuk (DBU), Hiroshi, l-methylene dianiline, N, N,! (, hr -tetramethyl-t, 3
-Amines such as butanediamine can be mentioned.

本発明による感光性樹脂組成物の組成割合は。The composition ratio of the photosensitive resin composition according to the present invention is as follows.

塗布に必要な粘度、紫外線硬化速度、形成された塗膜の
所望の厚さおよび硬さによって決定される。
It is determined by the viscosity required for the application, the rate of UV curing, and the desired thickness and hardness of the coating formed.

望ましい組成物の成分割合は次のとおりであるニアクリ
ル化エポキシ樹脂(tO〜100%望ましくは30〜i
oo%のエポキシ官能基がアクリル化されている)10
−20重量%、熱可塑性樹脂10〜−0重量%、エチレ
ン性不飽和結合またはエポキシ基を有する液状または半
液状化合物θ〜/6重量%、光重合開始剤0.03〜7
.5重量%、硬化触媒0,03〜0015重量%、着色
剤0./〜0.r重量%、重量%老残ソルブアセテート
、トリクレンなどの溶剤により成る。最良の結果は、ア
クリル化エポキシ樹脂(デ0%のエポキシ基がアクリル
化されている)16重量%、熱可塑性樹脂16重量%、
エチレン性不飽和結合を有する化合物IQ重景%、光重
合開始剤0.7重量%、硬化触媒403重量%、着色剤
0.3重量%、トリクレン16重量%、セロソルブアセ
テ−ドグ0重量%を含む組成において得られた。
Desirable component proportions of the composition are as follows: Niacrylated epoxy resin (tO~100% desirably 30~i
oo% of epoxy functional groups are acrylated) 10
-20% by weight, thermoplastic resin 10 to -0% by weight, liquid or semi-liquid compound θ to /6% by weight having an ethylenically unsaturated bond or epoxy group, photopolymerization initiator 0.03 to 7
.. 5% by weight, curing catalyst 0.03-0015% by weight, colorant 0. /~0. rwt%, wt% old residual solve acetate, trichlene, and other solvents. The best results are 16% by weight of acrylated epoxy resin (0% of the epoxy groups are acrylated), 16% by weight of thermoplastic resin,
Contains IQ compound having ethylenically unsaturated bonds, 0.7% by weight of photopolymerization initiator, 403% by weight of curing catalyst, 0.3% by weight of colorant, 16% by weight of trichloride, 0% by weight of cellosolve acetate. obtained in a composition containing.

本発明において用いられるアクリル化エポキシ樹脂は、
以下に述べるような方法によって合成される。すなわち
、前記したトリクレン、メチルエチルケトン、セロソル
ブ、セロソルブアセテート等の溶剤にエポキシ樹脂を完
全に溶解し、触媒として一一エチルー弘−メチルイミダ
ゾールまたは前記DBUをエポキシ樹脂に対して/X*
%添加し、得られた溶液にエチレン性の不飽和結合を有
するカルボン酸を加えtoA−ioo℃でコ〜を時間反
応させる。
The acrylated epoxy resin used in the present invention is
It is synthesized by the method described below. That is, an epoxy resin is completely dissolved in a solvent such as tricrene, methyl ethyl ketone, cellosolve, cellosolve acetate, etc., and ethyl-ethyl-methylimidazole or the above DBU is added to the epoxy resin as a catalyst.
%, and a carboxylic acid having an ethylenically unsaturated bond is added to the obtained solution, and the mixture is reacted at toA-ioo°C for an hour.

エチレン性の不飽和結合を有するカルボン酸のエポキシ
樹脂に対する相対割合は、10−100%。
The relative proportion of the carboxylic acid having ethylenically unsaturated bonds to the epoxy resin is 10-100%.

望ましくはgo−ioo%のエポキシ樹脂中のエポキシ
基と化学量論的に反応するのに十分な量である。
Desirably, the amount is sufficient to stoichiometrically react with go-ioo% of the epoxy groups in the epoxy resin.

この反応生成物を、熱可塑性樹脂、1分子中に少なくと
もコ個以上のエチレン性不飽和結合またはエポキシ官能
基を含む液状または半液状の化合物、光重合開始剤、硬
化触媒1着色剤および溶剤とともに攪拌、混合し【感光
性樹脂組成物を得る。
This reaction product is combined with a thermoplastic resin, a liquid or semi-liquid compound containing at least one ethylenically unsaturated bond or an epoxy functional group in one molecule, a photopolymerization initiator, a curing catalyst, a colorant, and a solvent. Stir and mix to obtain a photosensitive resin composition.

得られた組成物は、スピンコード、ディップコート、ロ
ーラーコート等の方法により、ガラス−エポキシ積層板
、ガラス・ポリイミド積層板など各種基板上に塗布され
る。基板と塗膜の密着性を向上させるためには、溶剤や
機械的研磨によって基板の粗化な行なうことが望ましい
The obtained composition is applied onto various substrates such as glass-epoxy laminates and glass-polyimide laminates by methods such as spin cording, dip coating, and roller coating. In order to improve the adhesion between the substrate and the coating film, it is desirable to roughen the substrate using a solvent or mechanical polishing.

上述の組成物を塗布した基板は、所定の温度、時間でプ
リベーキングを行ない、溶剤の大部分を揮発させネガ・
マスクを密着させて露光するのに好ましい状態にした後
、ネガ・マスクをとおして露光される。次いで組成物中
に含まれる溶剤の沸点に応じた温度1時間で加熱し、塗
膜中に残存する溶剤を完全に除去してから、トリクレン
、メチルエチルケトン、トルエン、シクロヘキサノンm
’sl、2.コーチトラクロロエチレン等の溶剤または
これらの混合溶媒で現像を行なう。この後、水洗と乾燥
を行ない、約l!rO℃の温度に30分からコ時間さら
すことによって完全に硬化を行なう。
The substrate coated with the above composition is prebaked at a predetermined temperature and time to volatilize most of the solvent and create a negative image.
After the mask is brought into close contact and conditions are favorable for exposure, exposure is performed through a negative mask. Next, the composition is heated at a temperature corresponding to the boiling point of the solvent contained in the composition for 1 hour to completely remove the solvent remaining in the coating film, and then treated with tricrene, methyl ethyl ketone, toluene, and cyclohexanone m.
'sl, 2. Development is carried out using a solvent such as coachtrachlorethylene or a mixed solvent thereof. After this, wash with water and dry, about 1 liter! Complete curing is achieved by exposure to temperatures of 30 minutes to 30 degrees Celsius.

形成されたメツキレシストパターンは、50μ轟までの
解像度を有しており%pHl2)、り0〜10℃の無電
解鋼メッキ浴中で41時間以上放置しても変化はみられ
ず、十分な耐無電解メッキ液性を有している。
The formed mesh resist pattern has a resolution of up to 50 μm (% pH 12), and no change was observed even after being left in an electroless steel plating bath at 0 to 10°C for more than 41 hours. It has excellent electroless plating solution resistance.

〔実施例〕〔Example〕

以下本発明の望ましい実施例を示すが、本発明は特にこ
れに限定するわけではない。
Preferred embodiments of the present invention will be shown below, but the present invention is not particularly limited thereto.

実施例 I クレゾールノボラック型エポキシ樹脂KSCN−tqz
XL(住友化学展商品名、エポキシ当量tqr)iqz
tiをセロソルブアセチ−トコoogに溶解し、この溶
液をコーエチルー弘−メチルーイミダゾールを触媒とし
て、メタクリル酸ttgと95℃で3時間反応して、反
応生成物であるアクリル化エポキシ樹脂溶液を得る。こ
のアクリル化エポキシ樹脂溶液中に、フェノキシ樹脂(
ユニオンのカーバイド社製商品名UCARPKHC) 
J 00 Ii、 !−エチルーアントラキノンz0,
9.DBUコ17タロシアニングリーン!1.熱重合禁
止剤としてp−メトキシフェノールo、r g 、及び
メチルエチルケトン3!rO/iを混合し、感光性樹脂
組成物を得た・ 得られた組成物を穴あけした後活性化処理したガラス・
エポキシ積層板上にローラー・コーp −を用いた約6
0μ属の厚さに塗布し、SO℃オーブン中で30分間プ
リベーキングを行なう。次いで所定のネガ・マスクを通
して、塗膜表面の/cdあたり約コよIIEWの強度を
有する超高圧水銀灯を19〜10秒照射し、露光を行な
う。この後90℃で30分間乾燥し、メチルエチルケト
ンとトルエンの混合溶媒で現像する。水洗、乾燥後、1
10℃で1時間加熱することによって硬化を行なう。
Example I Cresol novolac type epoxy resin KSCN-tqz
XL (Sumitomo Chemical Exhibition product name, epoxy equivalent tqr) iqz
Ti is dissolved in cellosolve acetate, and this solution is reacted with methacrylic acid ttg at 95° C. for 3 hours using coethyl-Hiro-methyl-imidazole as a catalyst to obtain an acrylated epoxy resin solution as a reaction product. In this acrylated epoxy resin solution, phenoxy resin (
Union Carbide product name UCARPKHC)
J 00 Ii, ! -ethyl anthraquinone z0,
9. DBU Ko17 Talocyanine Green! 1. p-methoxyphenol o, rg, and methyl ethyl ketone 3 as thermal polymerization inhibitors! A photosensitive resin composition was obtained by mixing rO/i. Glass was activated after drilling holes in the obtained composition.
Approximately 6 using a roller corp on an epoxy laminate
It is coated to a thickness of 0 μm and prebaked for 30 minutes in an SO°C oven. Next, through a predetermined negative mask, an ultra-high pressure mercury lamp having an intensity of approximately IIEW per cd of the coating surface is irradiated for 19 to 10 seconds to perform exposure. Thereafter, it is dried at 90° C. for 30 minutes and developed with a mixed solvent of methyl ethyl ketone and toluene. After washing with water and drying, 1
Curing is carried out by heating at 10° C. for 1 hour.

上述の被dパターンは、基板と対して強方な接着性を示
すとともに、無電解銅メッキ条件でも変化を受けない。
The above-described d pattern exhibits strong adhesion to the substrate and does not change even under electroless copper plating conditions.

実施例 コ フェノールノボラック型エポキシ樹脂DT!、N’1J
t(タウ・ケミカル社製商品名、エポキシ当量176N
lざl)コθopをトリクレン2 o o g、に爵解
し、この溶液にメタクリル!26AIIをDBUコyを
触媒として90℃で3時間反応させて得た反応生成物に
、t、t、2.2−テ′トラクロロエタンコoogに溶
解したポリスルホン200!、メチルセロソルブアセテ
ートroy、ベンゾフェノン9gとミヒラーケント/f
iの混合物、トリス−(−一アクリロキシ)−イソシア
ヌレート(日立化成社Mm品名、FA−り3/−A)1
00!、クリスタルバイオレット31.p−メトキシ−
フェノールQ、/iを混合して、感光性樹脂組成物を得
た。
Example Cophenol novolac type epoxy resin DT! ,N'1J
t (trade name, manufactured by Tau Chemical Co., Ltd., epoxy equivalent: 176N)
1) Add θop to Trichloride 2 o o g, and add methacrylic to this solution. Polysulfone 200 dissolved in t,t,2,2'-tetrachloroethane was added to the reaction product obtained by reacting 26AII with DBU coy as a catalyst at 90°C for 3 hours! , methyl cellosolve acetate roy, benzophenone 9g and Michlerkent/f
mixture of i, tris-(-monoacryloxy)-isocyanurate (Hitachi Chemical Mm product name, FA-ri 3/-A) 1
00! , Crystal Violet 31. p-methoxy-
Phenol Q,/i was mixed to obtain a photosensitive resin composition.

得られた組成物をディップ・コーティング法を用いて、
活性化処理したガラス・ポリイミド積層板上に塗布し、
60℃で30分間プリベーキングを行なう。次いで実施
例1で述べたように露光、現像、硬化を行なう。得られ
たメッキ・レジストパターンで被覆された基板を無電解
銅メッキ浴に16時間浸漬することによって、厚さ、y
oμ風の銅配線パターンが形成され、メツキレシストの
劣化やメッキのレジスト上への析出は見られなかった。
The resulting composition was coated using a dip coating method.
Coated on activated glass/polyimide laminate,
Prebaking is performed at 60°C for 30 minutes. Exposure, development, and curing are then performed as described in Example 1. The substrate coated with the resulting plating resist pattern was immersed in an electroless copper plating bath for 16 hours to reduce the thickness, y
An oμ-like copper wiring pattern was formed, and no deterioration of the plating resist or precipitation of plating on the resist was observed.

実施例 3 クレゾール・ノボラック型エポキシ樹脂E8CN−/9
!XL/9!Iを7クロヘキサノンλoogに溶解し、
この溶液にアクリル酸3gg、コーエチルー弘−メチル
イミダゾールtigを加えて90℃で2時間反応させて
得た生成物に、フェノキシ樹脂(UCARPKHC)/
 001.コーt−ブチルーアントラキノン109.)
リメチロールプロパントリアクリレート30g、エチル
バイオレット3I、コーエチルー弘−メチルイミダゾー
ルコi。
Example 3 Cresol novolac type epoxy resin E8CN-/9
! XL/9! I was dissolved in 7 clohexanone λoog,
To this solution, 3 gg of acrylic acid and Koechyl-Hiro-Methylimidazole tig were added and reacted at 90°C for 2 hours.
001. Coated t-butyl-anthraquinone 109. )
Limethylolpropane triacrylate 30g, Ethyl Violet 3I, Coethyl-Hiro-Methylimidazole Co I.

p−メトキシフェノールo、tg、セロツル7tl。p-Methoxyphenol o, tg, Serotsuru 7tl.

iを加え、感光性樹脂組成物を得た。i was added to obtain a photosensitive resin composition.

得られた組成物をスピナーを用いてガラス・エポキシ積
層板上に塗布し、実施例1.−と同様の方法で、パター
ン幅!θμmのメツキレシストパターンを得た。このメ
ツキレシストパターンは、基板との良好な接着性を示し
、無電解鋼メッキをコタ時間行なった後も変化は見られ
なかった。
The resulting composition was applied onto a glass-epoxy laminate using a spinner, and Example 1. - Pattern width in the same way as ! A mesh resist pattern of θ μm was obtained. This metal resist pattern showed good adhesion to the substrate, and no change was observed even after electroless steel plating was performed for a long time.

実施例 グ フェノールノボラック型エポキシ樹脂DEN (431
(ダウ・ケミカル社製商品名、エポキシ当量/74〜/
El’)/gelをメチルエチルケトンtroyに溶解
し、この溶液にアクリル酸styとDBUユ9を添加し
て90℃で3時間反応して得た生成物に、液状のビス・
フェノールA型エポキシ樹脂DERjJコ(ダウ・ケミ
カル社製商品名)りOl、ポリスルホン/10!!、コ
ーメチルアントラキノン1077、コーエチルーグーメ
チルイミダゾール2g、フタロシアニングリーン!rf
l、p−メトキシフェノール0. / l 、プチルカ
ルビトールグθOgを加えて感光性樹脂組成物を得た。
Example Gphenol novolac type epoxy resin DEN (431
(Product name manufactured by Dow Chemical Company, epoxy equivalent weight /74~/
El')/gel was dissolved in methyl ethyl ketone troy, acrylic acid sty and DBU 9 were added to this solution, and the resulting product was reacted at 90°C for 3 hours.
Phenol A type epoxy resin DERjJ (trade name manufactured by Dow Chemical Company), polyol, polysulfone/10! ! , co-methylanthraquinone 1077, co-methyl-goo-methylimidazole 2g, phthalocyanine green! rf
l, p-methoxyphenol 0. /l and butylcarbitolg θOg were added to obtain a photosensitive resin composition.

得られた組成物をディップ・コーターを用いて約15μ
扉ずつ一回塗布して、約30μmの厚さに活性処理した
ガラス・ポリイミド基板上に塗布し、60℃で2θ分乾
燥した。次いでt、lあたり約5Or!LWの強度を有
する高圧水銀灯をネガ・マスクを通して両面から20秒
照射することによって露光を行なまた。90℃で1時間
放置した後、セロソルブアセテートで現像し、水で洗浄
、乾燥後、130℃で1時間後硬化を行なった。
The resulting composition was coated with a coating of about 15 μm using a dip coater.
The coating was applied once to each door to a thickness of about 30 μm on an activated glass polyimide substrate, and dried at 60° C. for 2θ minutes. Then t, about 5 Or per l! Exposure was carried out by irradiating both sides through a negative mask for 20 seconds with a high-pressure mercury lamp having an intensity of LW. After being left at 90°C for 1 hour, it was developed with cellosolve acetate, washed with water, dried, and post-cured at 130°C for 1 hour.

上記のようにしてフォトレジストのパターンを形成した
基板を、無電解銅メッキ液に70℃で2時間浸漬して厚
さ20μ瓜、幅10μmの銅配線パターンを得た。レジ
スト上への銅メッキの析出に基づく短絡JPフォトレジ
ストパターンのメッキ液による劣化、メッキ液の汚染は
見られなかった。
The substrate on which the photoresist pattern was formed as described above was immersed in an electroless copper plating solution at 70° C. for 2 hours to obtain a copper wiring pattern with a thickness of 20 μm and a width of 10 μm. No deterioration of the short-circuit JP photoresist pattern due to the precipitation of copper plating on the resist due to the plating solution or contamination of the plating solution was observed.

実施例 ! クレゾールノボラック型エポキシ樹脂E8CN−/?j
XL /9jTii  をセロソルブアセチ−トコoo
gに溶解し、この溶液にコーエチルーφ−メチルイミダ
ゾールコIを触媒として、メタクリルr!IRtbiを
100℃で3時間反応してアクリル化エポキシ樹脂を得
た。これにフェノキシ樹1i (UCARRKHC)2
0011.2−t−ブチル−アントラキノンiog 。
Example ! Cresol novolac type epoxy resin E8CN-/? j
XL /9jTii to cellosolve acetateoo
g, and in this solution, methacrylic r! IRtbi was reacted at 100° C. for 3 hours to obtain an acrylated epoxy resin. To this, phenoxy tree 1i (UCARRKHC) 2
0011.2-tert-butyl-anthraquinone iog.

DBUコI、フタロシアニングリーン!rfi、p−メ
トキシフェノールo、zti、メチルエチルケトン3j
DBU Ko I, phthalocyanine green! rfi, p-methoxyphenol o, zti, methyl ethyl ketone 3j
.

1、DERJJ27θIを混合して感光性樹脂組成物を
得た。
1. A photosensitive resin composition was obtained by mixing DERJJ27θI.

得られた組成物を実施例3と同様の方法でパターン形成
を行ない、無電解銅メッキを行ない、所望の銅配線パタ
ーンを得た。耐メツキ液性およびメッキ特性を比較する
ために下記の比較例1.コを掲げる。
The resulting composition was patterned in the same manner as in Example 3, and electroless copper plating was performed to obtain a desired copper wiring pattern. In order to compare plating liquid resistance and plating characteristics, the following comparative example 1. Raise the ko.

比較例 l クレゾールノボラック型エポキシ樹脂E8CN−/9!
rXL /9!;11とメタクリル酸u、、? 9、ト
リクレン−〇0I%コーエチルーダーメチルイミタソー
ルユIから5%のエポキシ当量基がアクリル化されてい
るアクリル化エポキシ樹脂形液を得、これにフェノキシ
樹脂コoog%コーエチルアントラキノン109、エチ
ルバイオレット、2g、DBUコI、セロソルブアセテ
ートー〇θyを加えて感光性樹脂組成物を得た。この組
成物を実施例1と同様の方法でパターン形成、メッキを
行なったが、耐メツキ液性は有したが表面が現像時に荒
itたことから、レジスト上に銅メッキが多く析出した
Comparative Example l Cresol novolac type epoxy resin E8CN-/9!
rXL /9! ;11 and methacrylic acid u,? 9. An acrylated epoxy resin liquid in which 5% of the epoxy equivalent groups are acrylated was obtained from tricrene-〇0I% coethyl anthraquinone 109, A photosensitive resin composition was obtained by adding 2 g of ethyl violet, DBU CoI, and cellosolve acetate 〇θy. This composition was patterned and plated in the same manner as in Example 1, but although it had plating solution resistance, the surface was rough during development and a large amount of copper plating was deposited on the resist.

比較例 コ 実施例1と同様にして合成したアクリル化エボキ キシ樹脂にコーエチルアントラ!ノンtoy。Comparative example Acrylated ebony synthesized in the same manner as in Example 1 Coethyl anthra to oxyresin! Non-toy.

DBUコI、フタロシアニングリーンsi、メチルエチ
ルケトンJ!Oflを混合して感光性樹脂組成物を得た
DBU Co I, Phthalocyanine Green SI, Methyl Ethyl Ketone J! A photosensitive resin composition was obtained by mixing Ofl.

上述の組成物を実施fR/−jに示すような方法で塗布
したが、均一な塗膜を得ることはできなかった。
Although the above-mentioned composition was applied by the method shown in Example fR/-j, it was not possible to obtain a uniform coating film.

また実施例1と同様にパターン形成、メッキを行なった
が、良好な耐メツキ液性、メッキ性は得られなかった。
Although pattern formation and plating were performed in the same manner as in Example 1, good plating liquid resistance and plating properties were not obtained.

なお上記実施例では写真法によるパターン形成について
述べたか、微粉末のシリカ等を添加して該感光性樹脂組
成物にチキントロピー性を付与すれは、スクリーン印刷
によるパターン形成を行なうことかできるレジストイン
クとしても使用することか可能であり、上記実施例と同
様の効果を持つ。
In addition, in the above examples, pattern formation by a photographic method was described, but if finely powdered silica or the like is added to give chicken tropism to the photosensitive resin composition, a resist ink can be used to form a pattern by screen printing. It is also possible to use it as an example, and it has the same effect as the above embodiment.

〔発明の効果〕〔Effect of the invention〕

以上のように、本発明によれは写真法によりファインパ
ターンを有するメツキレシストパターン号 が形成回能になり、またこのメツキレシストは耐熱電解
銅メッキ液性を有するため、フルφアディティブ法によ
り安価にファインパターンを有するプリント基板が製造
可能となる効果がある。
As described above, according to the present invention, it is possible to form a metskiresist pattern having a fine pattern using a photographic method, and since this metskiresist has heat-resistant electrolytic copper plating liquid properties, it can be formed at low cost by the full φ additive method. This has the effect of making it possible to manufacture printed circuit boards with fine patterns.

Claims (4)

【特許請求の範囲】[Claims] (1)エチレン性の不飽和結合を有するカルボン酸とエ
ポキシ樹脂との反応生成物、熱可塑性樹脂、エチレン性
不飽和結合またはエポキシ基を有する化合物、光重合開
始剤、熱硬化触媒、溶剤及び着色剤から成る感光性樹脂
組成物。
(1) Reaction product of carboxylic acid having an ethylenically unsaturated bond and epoxy resin, thermoplastic resin, compound having an ethylenically unsaturated bond or epoxy group, photopolymerization initiator, thermosetting catalyst, solvent, and coloring A photosensitive resin composition consisting of an agent.
(2)エチレン性の不飽和結合を有するカルボン酸とエ
ポキシ樹脂との反応生成物が、エポキシ樹脂のエポキシ
基の10〜100%がエチレン性の不飽和結合を有する
カルボン酸によつてアクリル化されている特許請求の範
囲第1項記載の感光性樹脂組成物。
(2) The reaction product of a carboxylic acid having an ethylenically unsaturated bond and an epoxy resin is such that 10 to 100% of the epoxy groups of the epoxy resin are acrylated by the carboxylic acid having an ethylenically unsaturated bond. The photosensitive resin composition according to claim 1.
(3)熱可塑性樹脂が、高分子量のフェノキシ樹脂また
はポリスルホン樹脂である特許請求の範囲第1項記載の
感光性樹脂組成物。
(3) The photosensitive resin composition according to claim 1, wherein the thermoplastic resin is a high molecular weight phenoxy resin or polysulfone resin.
(4)エチレン性不飽和結合またはエポキシ基を有する
化合物が、一分子中に少なくとも2個以上のエチレン性
不飽和結合またはエポキシ基を有し室温において液状ま
たは半液状の化合物である特許請求の範囲第1項記載の
感光性樹脂組成物。
(4) Claims in which the compound having an ethylenically unsaturated bond or an epoxy group has at least two or more ethylenically unsaturated bonds or epoxy groups in one molecule and is a liquid or semi-liquid compound at room temperature. 2. The photosensitive resin composition according to item 1.
JP1865185A 1985-02-04 1985-02-04 Photosensitive resin composition Pending JPS61177449A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1865185A JPS61177449A (en) 1985-02-04 1985-02-04 Photosensitive resin composition

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1865185A JPS61177449A (en) 1985-02-04 1985-02-04 Photosensitive resin composition

Publications (1)

Publication Number Publication Date
JPS61177449A true JPS61177449A (en) 1986-08-09

Family

ID=11977518

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1865185A Pending JPS61177449A (en) 1985-02-04 1985-02-04 Photosensitive resin composition

Country Status (1)

Country Link
JP (1) JPS61177449A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6385538A (en) * 1986-09-29 1988-04-16 Asahi Chem Ind Co Ltd Photosettable laminated body and picture image forming method using thereof
JPS63226096A (en) * 1987-03-14 1988-09-20 ソニー株式会社 Material for protecting from solder
JPH0243551A (en) * 1988-08-04 1990-02-14 Fuji Photo Film Co Ltd Liquid photosensitive resin composition
JPH03126950A (en) * 1989-10-12 1991-05-30 Fuji Photo Film Co Ltd Photosetting resin composition

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6385538A (en) * 1986-09-29 1988-04-16 Asahi Chem Ind Co Ltd Photosettable laminated body and picture image forming method using thereof
JPS63226096A (en) * 1987-03-14 1988-09-20 ソニー株式会社 Material for protecting from solder
JPH0243551A (en) * 1988-08-04 1990-02-14 Fuji Photo Film Co Ltd Liquid photosensitive resin composition
JPH03126950A (en) * 1989-10-12 1991-05-30 Fuji Photo Film Co Ltd Photosetting resin composition

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