JPS61177443U - - Google Patents

Info

Publication number
JPS61177443U
JPS61177443U JP6040985U JP6040985U JPS61177443U JP S61177443 U JPS61177443 U JP S61177443U JP 6040985 U JP6040985 U JP 6040985U JP 6040985 U JP6040985 U JP 6040985U JP S61177443 U JPS61177443 U JP S61177443U
Authority
JP
Japan
Prior art keywords
etching
etched
substrate
etching liquid
jetted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6040985U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0143863Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985060409U priority Critical patent/JPH0143863Y2/ja
Publication of JPS61177443U publication Critical patent/JPS61177443U/ja
Application granted granted Critical
Publication of JPH0143863Y2 publication Critical patent/JPH0143863Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP1985060409U 1985-04-24 1985-04-24 Expired JPH0143863Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985060409U JPH0143863Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-04-24 1985-04-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985060409U JPH0143863Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-04-24 1985-04-24

Publications (2)

Publication Number Publication Date
JPS61177443U true JPS61177443U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1986-11-05
JPH0143863Y2 JPH0143863Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-12-19

Family

ID=30587730

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985060409U Expired JPH0143863Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1985-04-24 1985-04-24

Country Status (1)

Country Link
JP (1) JPH0143863Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015503240A (ja) * 2011-12-16 2015-01-29 エルジー シルトロン インコーポレイテッド 枚葉式ウェハエッチング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585342U (ja) * 1981-06-30 1983-01-13 富士通株式会社 ウェハ−表面処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS585342U (ja) * 1981-06-30 1983-01-13 富士通株式会社 ウェハ−表面処理装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2015503240A (ja) * 2011-12-16 2015-01-29 エルジー シルトロン インコーポレイテッド 枚葉式ウェハエッチング装置

Also Published As

Publication number Publication date
JPH0143863Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-12-19

Similar Documents

Publication Publication Date Title
JP2008072115A (ja) チャック部材及びスピンヘッド、これを用いるチャック方法
JPS61177443U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0137715Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP3338544B2 (ja) 乾燥方法及び乾燥装置
JPS60104204U (ja) デカンタ
JPH0123557Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS62143597U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS58188668A (ja) インクジエツト印写装置におけるヘツド構造
JPH0334064U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS59154244U (ja) 浴槽
JPH0311061U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6316550U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0448283Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6365221U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS609591U (ja) 液体管洗浄具
JP2001260980A (ja) 摩擦抵抗低減船
JPH02102726U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS58100058U (ja) 泡沫薬液散布用ノズル
JPH0188717U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0659934B2 (ja) 流体式フイ−ダ−ノズル
JPS6074775U (ja) 回転式表面処理装置
JPH0356691U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS6393143U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH01167236U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPS641799U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)