JPS61174744U - - Google Patents

Info

Publication number
JPS61174744U
JPS61174744U JP5834285U JP5834285U JPS61174744U JP S61174744 U JPS61174744 U JP S61174744U JP 5834285 U JP5834285 U JP 5834285U JP 5834285 U JP5834285 U JP 5834285U JP S61174744 U JPS61174744 U JP S61174744U
Authority
JP
Japan
Prior art keywords
handle portion
fixed shaft
branch
whose
semiconductor wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5834285U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5834285U priority Critical patent/JPS61174744U/ja
Publication of JPS61174744U publication Critical patent/JPS61174744U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Gripping Jigs, Holding Jigs, And Positioning Jigs (AREA)
  • Drying Of Semiconductors (AREA)
JP5834285U 1985-04-19 1985-04-19 Pending JPS61174744U (US20020167097A1-20021114-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5834285U JPS61174744U (US20020167097A1-20021114-C00005.png) 1985-04-19 1985-04-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5834285U JPS61174744U (US20020167097A1-20021114-C00005.png) 1985-04-19 1985-04-19

Publications (1)

Publication Number Publication Date
JPS61174744U true JPS61174744U (US20020167097A1-20021114-C00005.png) 1986-10-30

Family

ID=30583751

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5834285U Pending JPS61174744U (US20020167097A1-20021114-C00005.png) 1985-04-19 1985-04-19

Country Status (1)

Country Link
JP (1) JPS61174744U (US20020167097A1-20021114-C00005.png)

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