JPS61173150U - - Google Patents

Info

Publication number
JPS61173150U
JPS61173150U JP5729985U JP5729985U JPS61173150U JP S61173150 U JPS61173150 U JP S61173150U JP 5729985 U JP5729985 U JP 5729985U JP 5729985 U JP5729985 U JP 5729985U JP S61173150 U JPS61173150 U JP S61173150U
Authority
JP
Japan
Prior art keywords
base
recess
sensor
pressure
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5729985U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5729985U priority Critical patent/JPS61173150U/ja
Publication of JPS61173150U publication Critical patent/JPS61173150U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP5729985U 1985-04-17 1985-04-17 Pending JPS61173150U (US06826419-20041130-M00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5729985U JPS61173150U (US06826419-20041130-M00005.png) 1985-04-17 1985-04-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5729985U JPS61173150U (US06826419-20041130-M00005.png) 1985-04-17 1985-04-17

Publications (1)

Publication Number Publication Date
JPS61173150U true JPS61173150U (US06826419-20041130-M00005.png) 1986-10-28

Family

ID=30581695

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5729985U Pending JPS61173150U (US06826419-20041130-M00005.png) 1985-04-17 1985-04-17

Country Status (1)

Country Link
JP (1) JPS61173150U (US06826419-20041130-M00005.png)

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