JPS61169911U - - Google Patents

Info

Publication number

JPS61169911U

JPS61169911U JP5391985U JP5391985U JPS61169911U JP S61169911 U JPS61169911 U JP S61169911U JP 5391985 U JP5391985 U JP 5391985U JP 5391985 U JP5391985 U JP 5391985U JP S61169911 U JPS61169911 U JP S61169911U

Authority

JP

Japan

Prior art keywords

abnormal pressure

layer

conductive layer

conductive

insulator

Prior art date

1985-04-11

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000002159 abnormal effect Effects 0.000 claims description 6
• 238000001514 detection method Methods 0.000 claims description 3
• 239000012212 insulator Substances 0.000 claims description 2
• 239000004020 conductor Substances 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1