JPS61167508U - - Google Patents

Info

Publication number

JPS61167508U

JPS61167508U JP5261285U JP5261285U JPS61167508U JP S61167508 U JPS61167508 U JP S61167508U JP 5261285 U JP5261285 U JP 5261285U JP 5261285 U JP5261285 U JP 5261285U JP S61167508 U JPS61167508 U JP S61167508U

Authority

JP

Japan

Prior art keywords

polishing

dripping

wall thickness

thickness measurement

couplant

Prior art date

1985-04-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000005259 measurement Methods 0.000 claims description 3
• 238000005498 polishing Methods 0.000 claims 2

Cited By (3)