JPS61166787U - - Google Patents

Info

Publication number
JPS61166787U
JPS61166787U JP4996885U JP4996885U JPS61166787U JP S61166787 U JPS61166787 U JP S61166787U JP 4996885 U JP4996885 U JP 4996885U JP 4996885 U JP4996885 U JP 4996885U JP S61166787 U JPS61166787 U JP S61166787U
Authority
JP
Japan
Prior art keywords
vertical movement
sensor
manipulator
movement device
load sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP4996885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4996885U priority Critical patent/JPS61166787U/ja
Publication of JPS61166787U publication Critical patent/JPS61166787U/ja
Pending legal-status Critical Current

Links

JP4996885U 1985-04-05 1985-04-05 Pending JPS61166787U (US06623731-20030923-C00052.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4996885U JPS61166787U (US06623731-20030923-C00052.png) 1985-04-05 1985-04-05

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4996885U JPS61166787U (US06623731-20030923-C00052.png) 1985-04-05 1985-04-05

Publications (1)

Publication Number Publication Date
JPS61166787U true JPS61166787U (US06623731-20030923-C00052.png) 1986-10-16

Family

ID=30567651

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4996885U Pending JPS61166787U (US06623731-20030923-C00052.png) 1985-04-05 1985-04-05

Country Status (1)

Country Link
JP (1) JPS61166787U (US06623731-20030923-C00052.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011152621A (ja) * 2010-01-28 2011-08-11 Yaskawa Electric Corp 基板搬送用装置
CN102896638A (zh) * 2011-07-27 2013-01-30 发那科株式会社 带重量测量功能的吸附式机械手

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011152621A (ja) * 2010-01-28 2011-08-11 Yaskawa Electric Corp 基板搬送用装置
CN102896638A (zh) * 2011-07-27 2013-01-30 发那科株式会社 带重量测量功能的吸附式机械手
JP2013027940A (ja) * 2011-07-27 2013-02-07 Fanuc Ltd 重量計測機能付き吸着式ロボットハンド

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