JPS61165941A - 荷電粒子照射装置 - Google Patents

荷電粒子照射装置

Info

Publication number
JPS61165941A
JPS61165941A JP61006410A JP641086A JPS61165941A JP S61165941 A JPS61165941 A JP S61165941A JP 61006410 A JP61006410 A JP 61006410A JP 641086 A JP641086 A JP 641086A JP S61165941 A JPS61165941 A JP S61165941A
Authority
JP
Japan
Prior art keywords
lenses
magnetic field
charged particle
electron beam
ion beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61006410A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0235420B2 (enrdf_load_stackoverflow
Inventor
Hifumi Tamura
田村　一二三
Susumu Ishitani
石谷　享
Akira Shimase
朗 嶋瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP61006410A priority Critical patent/JPS61165941A/ja
Publication of JPS61165941A publication Critical patent/JPS61165941A/ja
Publication of JPH0235420B2 publication Critical patent/JPH0235420B2/ja
Granted legal-status Critical Current

Links

JP61006410A 1986-01-17 1986-01-17 荷電粒子照射装置 Granted JPS61165941A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61006410A JPS61165941A (ja) 1986-01-17 1986-01-17 荷電粒子照射装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61006410A JPS61165941A (ja) 1986-01-17 1986-01-17 荷電粒子照射装置

Publications (2)

Publication Number Publication Date
JPS61165941A true JPS61165941A (ja) 1986-07-26
JPH0235420B2 JPH0235420B2 (enrdf_load_stackoverflow) 1990-08-10

Family

ID=11637597

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61006410A Granted JPS61165941A (ja) 1986-01-17 1986-01-17 荷電粒子照射装置

Country Status (1)

Country Link
JP (1) JPS61165941A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991002374A1 (en) * 1988-03-09 1991-02-21 Seiko Instruments Inc. Charged particle ray apparatus and method of observing samples

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104290A (en) * 1976-02-27 1977-09-01 Shimadzu Corp Composite analysis unit

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52104290A (en) * 1976-02-27 1977-09-01 Shimadzu Corp Composite analysis unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1991002374A1 (en) * 1988-03-09 1991-02-21 Seiko Instruments Inc. Charged particle ray apparatus and method of observing samples

Also Published As

Publication number Publication date
JPH0235420B2 (enrdf_load_stackoverflow) 1990-08-10

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