JPS61164277U - - Google Patents

Info

Publication number

JPS61164277U

JPS61164277U JP4803985U JP4803985U JPS61164277U JP S61164277 U JPS61164277 U JP S61164277U JP 4803985 U JP4803985 U JP 4803985U JP 4803985 U JP4803985 U JP 4803985U JP S61164277 U JPS61164277 U JP S61164277U

Authority

JP

Japan

Prior art keywords

molecular beam

beam source

stored

source material

evaporation source

Prior art date

1985-03-30

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008020 evaporation Effects 0.000 claims description 3
• 238000001704 evaporation Methods 0.000 claims description 3
• 238000000407 epitaxy Methods 0.000 claims 1
• 238000010438 heat treatment Methods 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 6
• 238000001451 molecular beam epitaxy Methods 0.000 description 1