JPS61164064U - - Google Patents

Info

Publication number

JPS61164064U

JPS61164064U JP4796385U JP4796385U JPS61164064U JP S61164064 U JPS61164064 U JP S61164064U JP 4796385 U JP4796385 U JP 4796385U JP 4796385 U JP4796385 U JP 4796385U JP S61164064 U JPS61164064 U JP S61164064U

Authority

JP

Japan

Prior art keywords

recess

view

ceramic sheet

sectional

cross

Prior art date

1985-03-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000919 ceramic Substances 0.000 claims description 5
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 3
• 229910052802 copper Inorganic materials 0.000 claims description 3
• 239000010949 copper Substances 0.000 claims description 3
• 239000002184 metal Substances 0.000 claims 1
• 229910052751 metal Inorganic materials 0.000 claims 1
• 239000000758 substrate Substances 0.000 claims 1
• 238000000034 method Methods 0.000 description 4
• 238000005530 etching Methods 0.000 description 1