JPS61161724U - - Google Patents

Info

Publication number

JPS61161724U

JPS61161724U JP4512585U JP4512585U JPS61161724U JP S61161724 U JPS61161724 U JP S61161724U JP 4512585 U JP4512585 U JP 4512585U JP 4512585 U JP4512585 U JP 4512585U JP S61161724 U JPS61161724 U JP S61161724U

Authority

JP

Japan

Prior art keywords

receiving plate

heat receiving

thermally conductive

thin film

conductive heat

Prior art date

1985-03-29

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000010409 thin film Substances 0.000 claims description 4
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
• 239000011247 coating layer Substances 0.000 claims description 3
• 239000010408 film Substances 0.000 claims description 3
• 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
• 238000010521 absorption reaction Methods 0.000 claims 1
• 238000000151 deposition Methods 0.000 claims 1
• 239000000463 material Substances 0.000 claims 1
• 229910000623 nickel–chromium alloy Inorganic materials 0.000 claims 1
• 229910052710 silicon Inorganic materials 0.000 claims 1
• 239000010703 silicon Substances 0.000 claims 1
• 239000011810 insulating material Substances 0.000 description 1