JPS6116150B2 - - Google Patents

Info

Publication number
JPS6116150B2
JPS6116150B2 JP55183580A JP18358080A JPS6116150B2 JP S6116150 B2 JPS6116150 B2 JP S6116150B2 JP 55183580 A JP55183580 A JP 55183580A JP 18358080 A JP18358080 A JP 18358080A JP S6116150 B2 JPS6116150 B2 JP S6116150B2
Authority
JP
Japan
Prior art keywords
signal
detector
polarity
sample
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP55183580A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57107548A (en
Inventor
Yoshihiro Hirata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nihon Denshi KK filed Critical Nihon Denshi KK
Priority to JP55183580A priority Critical patent/JPS57107548A/ja
Publication of JPS57107548A publication Critical patent/JPS57107548A/ja
Publication of JPS6116150B2 publication Critical patent/JPS6116150B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP55183580A 1980-12-24 1980-12-24 Scan type electron microscope Granted JPS57107548A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP55183580A JPS57107548A (en) 1980-12-24 1980-12-24 Scan type electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55183580A JPS57107548A (en) 1980-12-24 1980-12-24 Scan type electron microscope

Publications (2)

Publication Number Publication Date
JPS57107548A JPS57107548A (en) 1982-07-05
JPS6116150B2 true JPS6116150B2 (https=) 1986-04-28

Family

ID=16138294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55183580A Granted JPS57107548A (en) 1980-12-24 1980-12-24 Scan type electron microscope

Country Status (1)

Country Link
JP (1) JPS57107548A (https=)

Also Published As

Publication number Publication date
JPS57107548A (en) 1982-07-05

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