JPS61161432A - 水晶式気体圧力計 - Google Patents

水晶式気体圧力計

Info

Publication number
JPS61161432A
JPS61161432A JP243785A JP243785A JPS61161432A JP S61161432 A JPS61161432 A JP S61161432A JP 243785 A JP243785 A JP 243785A JP 243785 A JP243785 A JP 243785A JP S61161432 A JPS61161432 A JP S61161432A
Authority
JP
Japan
Prior art keywords
oscillator
voltage
pressure
crystal
gas pressure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP243785A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0380253B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masatoshi Ono
雅敏 小野
Masahiro Hirata
正紘 平田
Kiyohide Kokubu
国分　清秀
Fujio Tamura
田村　富士夫
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Instruments Inc
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Seiko Instruments Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Seiko Instruments Inc filed Critical Agency of Industrial Science and Technology
Priority to JP243785A priority Critical patent/JPS61161432A/ja
Publication of JPS61161432A publication Critical patent/JPS61161432A/ja
Publication of JPH0380253B2 publication Critical patent/JPH0380253B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
    • G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
    • G01L9/0022—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations of a piezoelectric element

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP243785A 1985-01-10 1985-01-10 水晶式気体圧力計 Granted JPS61161432A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP243785A JPS61161432A (ja) 1985-01-10 1985-01-10 水晶式気体圧力計

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP243785A JPS61161432A (ja) 1985-01-10 1985-01-10 水晶式気体圧力計

Publications (2)

Publication Number Publication Date
JPS61161432A true JPS61161432A (ja) 1986-07-22
JPH0380253B2 JPH0380253B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-24

Family

ID=11529243

Family Applications (1)

Application Number Title Priority Date Filing Date
JP243785A Granted JPS61161432A (ja) 1985-01-10 1985-01-10 水晶式気体圧力計

Country Status (1)

Country Link
JP (1) JPS61161432A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01148932A (ja) * 1987-12-04 1989-06-12 Nagano Keiki Seisakusho:Kk 気体圧力計
JPH01291137A (ja) * 1988-05-17 1989-11-22 Yokogawa Electric Corp 振動式トランスデューサ
CN106123940A (zh) * 2015-05-05 2016-11-16 北京康智乐思网络科技有限公司 一种数据采集装置及采集方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01148932A (ja) * 1987-12-04 1989-06-12 Nagano Keiki Seisakusho:Kk 気体圧力計
JPH01291137A (ja) * 1988-05-17 1989-11-22 Yokogawa Electric Corp 振動式トランスデューサ
CN106123940A (zh) * 2015-05-05 2016-11-16 北京康智乐思网络科技有限公司 一种数据采集装置及采集方法

Also Published As

Publication number Publication date
JPH0380253B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1991-12-24

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term