JPS61159368U - - Google Patents

Info

Publication number

JPS61159368U

JPS61159368U JP4439185U JP4439185U JPS61159368U JP S61159368 U JPS61159368 U JP S61159368U JP 4439185 U JP4439185 U JP 4439185U JP 4439185 U JP4439185 U JP 4439185U JP S61159368 U JPS61159368 U JP S61159368U

Authority

JP

Japan

Prior art keywords

evaporation material

sample

vacuum container

hole

thin film

Prior art date

1985-03-26

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 230000008020 evaporation Effects 0.000 claims description 4
• 238000001704 evaporation Methods 0.000 claims description 4
• 239000000463 material Substances 0.000 claims description 4
• 239000010409 thin film Substances 0.000 claims description 3
• 238000010891 electric arc Methods 0.000 claims 1
• 239000012495 reaction gas Substances 0.000 claims 1
• 238000000034 method Methods 0.000 description 2
• 101100522758 Pseudomonas aeruginosa (strain ATCC 15692 / DSM 22644 / CIP 104116 / JCM 14847 / LMG 12228 / 1C / PRS 101 / PAO1) pvdA gene Proteins 0.000 description 1
• 150000001875 compounds Chemical class 0.000 description 1
• 238000010586 diagram Methods 0.000 description 1
• 239000000376 reactant Substances 0.000 description 1
• 238000000427 thin-film deposition Methods 0.000 description 1