JPS61158834U - - Google Patents
Info
- Publication number
- JPS61158834U JPS61158834U JP4241485U JP4241485U JPS61158834U JP S61158834 U JPS61158834 U JP S61158834U JP 4241485 U JP4241485 U JP 4241485U JP 4241485 U JP4241485 U JP 4241485U JP S61158834 U JPS61158834 U JP S61158834U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- diaphragm
- pressure sensor
- constitutes
- support base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000007789 sealing Methods 0.000 claims 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4241485U JPS61158834U (US06272168-20010807-M00014.png) | 1985-03-26 | 1985-03-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4241485U JPS61158834U (US06272168-20010807-M00014.png) | 1985-03-26 | 1985-03-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61158834U true JPS61158834U (US06272168-20010807-M00014.png) | 1986-10-02 |
Family
ID=30553146
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4241485U Pending JPS61158834U (US06272168-20010807-M00014.png) | 1985-03-26 | 1985-03-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61158834U (US06272168-20010807-M00014.png) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02131640U (US06272168-20010807-M00014.png) * | 1989-04-06 | 1990-11-01 |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4947680B1 (US06272168-20010807-M00014.png) * | 1969-02-27 | 1974-12-17 | ||
| JPS56100333A (en) * | 1979-12-05 | 1981-08-12 | Bofors America | Liquid pressure converter and production thereof* and oil gauge unit being attached to exposed*nearlyyflat end of converter |
| JPS5970933A (ja) * | 1982-10-15 | 1984-04-21 | Kyowa Dengiyou:Kk | 圧力変換器 |
| JPS60220837A (ja) * | 1984-04-17 | 1985-11-05 | Sumitomo Electric Ind Ltd | 歪センサ |
| JPS6165126A (ja) * | 1984-09-06 | 1986-04-03 | Copal Denshi Kk | 圧力センサ |
-
1985
- 1985-03-26 JP JP4241485U patent/JPS61158834U/ja active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4947680B1 (US06272168-20010807-M00014.png) * | 1969-02-27 | 1974-12-17 | ||
| JPS56100333A (en) * | 1979-12-05 | 1981-08-12 | Bofors America | Liquid pressure converter and production thereof* and oil gauge unit being attached to exposed*nearlyyflat end of converter |
| JPS5970933A (ja) * | 1982-10-15 | 1984-04-21 | Kyowa Dengiyou:Kk | 圧力変換器 |
| JPS60220837A (ja) * | 1984-04-17 | 1985-11-05 | Sumitomo Electric Ind Ltd | 歪センサ |
| JPS6165126A (ja) * | 1984-09-06 | 1986-04-03 | Copal Denshi Kk | 圧力センサ |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02131640U (US06272168-20010807-M00014.png) * | 1989-04-06 | 1990-11-01 |
