JPS61157329U - - Google Patents

Info

Publication number

JPS61157329U

JPS61157329U JP4105385U JP4105385U JPS61157329U JP S61157329 U JPS61157329 U JP S61157329U JP 4105385 U JP4105385 U JP 4105385U JP 4105385 U JP4105385 U JP 4105385U JP S61157329 U JPS61157329 U JP S61157329U

Authority

JP

Japan

Prior art keywords

heating element

wafers

vacuum suction

ferromagnetic

chromium

Prior art date

1985-03-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010438 heat treatment Methods 0.000 claims description 4
• 239000004065 semiconductor Substances 0.000 claims description 2
• 235000012431 wafers Nutrition 0.000 claims 3
• VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims 1
• 229910052804 chromium Inorganic materials 0.000 claims 1
• 239000011651 chromium Substances 0.000 claims 1
• 230000005294 ferromagnetic effect Effects 0.000 claims 1
• 229910001220 stainless steel Inorganic materials 0.000 claims 1
• 239000010935 stainless steel Substances 0.000 claims 1
• 229910000859 α-Fe Inorganic materials 0.000 claims 1
• 239000000919 ceramic Substances 0.000 description 1