JPS61156173U - - Google Patents
Info
- Publication number
- JPS61156173U JPS61156173U JP3931785U JP3931785U JPS61156173U JP S61156173 U JPS61156173 U JP S61156173U JP 3931785 U JP3931785 U JP 3931785U JP 3931785 U JP3931785 U JP 3931785U JP S61156173 U JPS61156173 U JP S61156173U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- ion species
- implantation
- species
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims description 3
- 238000002347 injection Methods 0.000 claims description 2
- 239000007924 injection Substances 0.000 claims description 2
- 238000004949 mass spectrometry Methods 0.000 claims description 2
- 239000000284 extract Substances 0.000 claims 2
- 238000002513 implantation Methods 0.000 claims 2
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3931785U JPS61156173U (https=) | 1985-03-18 | 1985-03-18 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3931785U JPS61156173U (https=) | 1985-03-18 | 1985-03-18 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61156173U true JPS61156173U (https=) | 1986-09-27 |
Family
ID=30547159
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3931785U Pending JPS61156173U (https=) | 1985-03-18 | 1985-03-18 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61156173U (https=) |
-
1985
- 1985-03-18 JP JP3931785U patent/JPS61156173U/ja active Pending