JPS61155430A - プラズマ処理方法 - Google Patents
プラズマ処理方法Info
- Publication number
- JPS61155430A JPS61155430A JP27433284A JP27433284A JPS61155430A JP S61155430 A JPS61155430 A JP S61155430A JP 27433284 A JP27433284 A JP 27433284A JP 27433284 A JP27433284 A JP 27433284A JP S61155430 A JPS61155430 A JP S61155430A
- Authority
- JP
- Japan
- Prior art keywords
- plasma
- gas
- different
- plasma treatment
- processing chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009832 plasma treatment Methods 0.000 title claims abstract description 19
- 239000007789 gas Substances 0.000 claims abstract description 58
- 239000000463 material Substances 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 16
- 238000012986 modification Methods 0.000 abstract description 2
- 230000004048 modification Effects 0.000 abstract description 2
- 210000002381 plasma Anatomy 0.000 abstract 4
- 230000015572 biosynthetic process Effects 0.000 abstract 1
- 239000012495 reaction gas Substances 0.000 description 8
- 238000005192 partition Methods 0.000 description 6
- 229920000915 polyvinyl chloride Polymers 0.000 description 5
- 239000004800 polyvinyl chloride Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 2
- 230000001070 adhesive effect Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- 238000003672 processing method Methods 0.000 description 2
- 238000010926 purge Methods 0.000 description 2
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- 239000004820 Pressure-sensitive adhesive Substances 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 239000002390 adhesive tape Substances 0.000 description 1
- 229910021529 ammonia Inorganic materials 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- NKSJNEHGWDZZQF-UHFFFAOYSA-N ethenyl(trimethoxy)silane Chemical compound CO[Si](OC)(OC)C=C NKSJNEHGWDZZQF-UHFFFAOYSA-N 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000002828 fuel tank Substances 0.000 description 1
- 229930195733 hydrocarbon Natural products 0.000 description 1
- 150000002430 hydrocarbons Chemical class 0.000 description 1
- 239000010410 layer Substances 0.000 description 1
- 210000003141 lower extremity Anatomy 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000002715 modification method Methods 0.000 description 1
- 150000003961 organosilicon compounds Chemical class 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 229920005672 polyolefin resin Polymers 0.000 description 1
- 238000000638 solvent extraction Methods 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27433284A JPS61155430A (ja) | 1984-12-28 | 1984-12-28 | プラズマ処理方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP27433284A JPS61155430A (ja) | 1984-12-28 | 1984-12-28 | プラズマ処理方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61155430A true JPS61155430A (ja) | 1986-07-15 |
| JPH046214B2 JPH046214B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-02-05 |
Family
ID=17540177
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP27433284A Granted JPS61155430A (ja) | 1984-12-28 | 1984-12-28 | プラズマ処理方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61155430A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10310652A (ja) * | 1997-05-14 | 1998-11-24 | Toppan Printing Co Ltd | 表面処理方法、その被処理物および表面処理装置 |
| JP2008547166A (ja) * | 2005-06-24 | 2008-12-25 | ソフタル エレクトロニック エリック ブルーメンフェルト ゲーエムベーハ− ウント コー カーゲー | 製品、特にプレート材または棒材を大気圧で連続的にプラズマ処理およびプラズマコーティングの少なくともいずれかをする方法 |
| JP2016129138A (ja) * | 2016-01-22 | 2016-07-14 | 沖野 晃俊 | プラズマ処理装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515869A (en) * | 1974-07-02 | 1976-01-19 | Torao Tobisu | Ekitaino seidenjokasochi |
| JPS59126437A (ja) * | 1983-01-07 | 1984-07-21 | Unitika Ltd | シ−ト状物の低温プラズマ処理方法 |
-
1984
- 1984-12-28 JP JP27433284A patent/JPS61155430A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS515869A (en) * | 1974-07-02 | 1976-01-19 | Torao Tobisu | Ekitaino seidenjokasochi |
| JPS59126437A (ja) * | 1983-01-07 | 1984-07-21 | Unitika Ltd | シ−ト状物の低温プラズマ処理方法 |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10310652A (ja) * | 1997-05-14 | 1998-11-24 | Toppan Printing Co Ltd | 表面処理方法、その被処理物および表面処理装置 |
| JP2008547166A (ja) * | 2005-06-24 | 2008-12-25 | ソフタル エレクトロニック エリック ブルーメンフェルト ゲーエムベーハ− ウント コー カーゲー | 製品、特にプレート材または棒材を大気圧で連続的にプラズマ処理およびプラズマコーティングの少なくともいずれかをする方法 |
| JP2016129138A (ja) * | 2016-01-22 | 2016-07-14 | 沖野 晃俊 | プラズマ処理装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH046214B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-02-05 |
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