JPS61153997U - - Google Patents

Info

Publication number

JPS61153997U

JPS61153997U JP3746085U JP3746085U JPS61153997U JP S61153997 U JPS61153997 U JP S61153997U JP 3746085 U JP3746085 U JP 3746085U JP 3746085 U JP3746085 U JP 3746085U JP S61153997 U JPS61153997 U JP S61153997U

Authority

JP

Japan

Prior art keywords

film

films

groove

hole

conductor

Prior art date

1985-03-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004020 conductor Substances 0.000 claims description 3
• 239000010408 film Substances 0.000 claims 5
• 239000010409 thin film Substances 0.000 claims 2
• 239000006096 absorbing agent Substances 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 229910052593 corundum Inorganic materials 0.000 description 1
• 239000011521 glass Substances 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1
• 229910001845 yogo sapphire Inorganic materials 0.000 description 1