JPS61153338U - - Google Patents

Info

Publication number
JPS61153338U
JPS61153338U JP3636585U JP3636585U JPS61153338U JP S61153338 U JPS61153338 U JP S61153338U JP 3636585 U JP3636585 U JP 3636585U JP 3636585 U JP3636585 U JP 3636585U JP S61153338 U JPS61153338 U JP S61153338U
Authority
JP
Japan
Prior art keywords
guide member
molecular beam
storage section
electron beam
heating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3636585U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3636585U priority Critical patent/JPS61153338U/ja
Publication of JPS61153338U publication Critical patent/JPS61153338U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP3636585U 1985-03-14 1985-03-14 Pending JPS61153338U (US20080094685A1-20080424-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3636585U JPS61153338U (US20080094685A1-20080424-C00004.png) 1985-03-14 1985-03-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3636585U JPS61153338U (US20080094685A1-20080424-C00004.png) 1985-03-14 1985-03-14

Publications (1)

Publication Number Publication Date
JPS61153338U true JPS61153338U (US20080094685A1-20080424-C00004.png) 1986-09-22

Family

ID=30541475

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3636585U Pending JPS61153338U (US20080094685A1-20080424-C00004.png) 1985-03-14 1985-03-14

Country Status (1)

Country Link
JP (1) JPS61153338U (US20080094685A1-20080424-C00004.png)

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