JPS61150862U - - Google Patents

Info

Publication number
JPS61150862U
JPS61150862U JP3247485U JP3247485U JPS61150862U JP S61150862 U JPS61150862 U JP S61150862U JP 3247485 U JP3247485 U JP 3247485U JP 3247485 U JP3247485 U JP 3247485U JP S61150862 U JPS61150862 U JP S61150862U
Authority
JP
Japan
Prior art keywords
crucible
provided around
heater
resistance heating
pulling
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP3247485U
Other languages
English (en)
Japanese (ja)
Other versions
JPH037405Y2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1985032474U priority Critical patent/JPH037405Y2/ja
Publication of JPS61150862U publication Critical patent/JPS61150862U/ja
Application granted granted Critical
Publication of JPH037405Y2 publication Critical patent/JPH037405Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1985032474U 1985-03-06 1985-03-06 Expired JPH037405Y2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985032474U JPH037405Y2 (cs) 1985-03-06 1985-03-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985032474U JPH037405Y2 (cs) 1985-03-06 1985-03-06

Publications (2)

Publication Number Publication Date
JPS61150862U true JPS61150862U (cs) 1986-09-18
JPH037405Y2 JPH037405Y2 (cs) 1991-02-25

Family

ID=30534020

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985032474U Expired JPH037405Y2 (cs) 1985-03-06 1985-03-06

Country Status (1)

Country Link
JP (1) JPH037405Y2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03120569U (cs) * 1990-03-15 1991-12-11
JPH0656571A (ja) * 1992-04-16 1994-03-01 Sumitomo Metal Ind Ltd 単結晶引き上げ時における単結晶酸素濃度の制御方法及び該方法に使用する結晶成長装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840666U (cs) * 1971-09-16 1973-05-23
JPS5345679A (en) * 1976-10-08 1978-04-24 Hitachi Ltd Pulling-up apparatus for sillicon single crystal
JPS55126597A (en) * 1979-03-23 1980-09-30 Nec Corp Single crystal growing method

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4840666U (cs) * 1971-09-16 1973-05-23
JPS5345679A (en) * 1976-10-08 1978-04-24 Hitachi Ltd Pulling-up apparatus for sillicon single crystal
JPS55126597A (en) * 1979-03-23 1980-09-30 Nec Corp Single crystal growing method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03120569U (cs) * 1990-03-15 1991-12-11
JPH0656571A (ja) * 1992-04-16 1994-03-01 Sumitomo Metal Ind Ltd 単結晶引き上げ時における単結晶酸素濃度の制御方法及び該方法に使用する結晶成長装置

Also Published As

Publication number Publication date
JPH037405Y2 (cs) 1991-02-25

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