JPS61150080A - 欠陥検出方法 - Google Patents

欠陥検出方法

Info

Publication number
JPS61150080A
JPS61150080A JP59278912A JP27891284A JPS61150080A JP S61150080 A JPS61150080 A JP S61150080A JP 59278912 A JP59278912 A JP 59278912A JP 27891284 A JP27891284 A JP 27891284A JP S61150080 A JPS61150080 A JP S61150080A
Authority
JP
Japan
Prior art keywords
detected
image
edge
defect
differential
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59278912A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410666B2 (enrdf_load_stackoverflow
Inventor
Toshinori Inoue
敏範 井上
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Electric Works Co Ltd
Original Assignee
Matsushita Electric Works Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Works Ltd filed Critical Matsushita Electric Works Ltd
Priority to JP59278912A priority Critical patent/JPS61150080A/ja
Publication of JPS61150080A publication Critical patent/JPS61150080A/ja
Publication of JPH0410666B2 publication Critical patent/JPH0410666B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Image Processing (AREA)
  • Image Analysis (AREA)
JP59278912A 1984-12-25 1984-12-25 欠陥検出方法 Granted JPS61150080A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59278912A JPS61150080A (ja) 1984-12-25 1984-12-25 欠陥検出方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59278912A JPS61150080A (ja) 1984-12-25 1984-12-25 欠陥検出方法

Publications (2)

Publication Number Publication Date
JPS61150080A true JPS61150080A (ja) 1986-07-08
JPH0410666B2 JPH0410666B2 (enrdf_load_stackoverflow) 1992-02-26

Family

ID=17603821

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59278912A Granted JPS61150080A (ja) 1984-12-25 1984-12-25 欠陥検出方法

Country Status (1)

Country Link
JP (1) JPS61150080A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006153502A (ja) * 2004-11-25 2006-06-15 Toshiba Corp 紙葉類検査装置および紙葉類検査方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006153502A (ja) * 2004-11-25 2006-06-15 Toshiba Corp 紙葉類検査装置および紙葉類検査方法

Also Published As

Publication number Publication date
JPH0410666B2 (enrdf_load_stackoverflow) 1992-02-26

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Legal Events

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EXPY Cancellation because of completion of term