JPS61150080A - 欠陥検出方法 - Google Patents
欠陥検出方法Info
- Publication number
- JPS61150080A JPS61150080A JP59278912A JP27891284A JPS61150080A JP S61150080 A JPS61150080 A JP S61150080A JP 59278912 A JP59278912 A JP 59278912A JP 27891284 A JP27891284 A JP 27891284A JP S61150080 A JPS61150080 A JP S61150080A
- Authority
- JP
- Japan
- Prior art keywords
- detected
- image
- edge
- defect
- differential
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000007547 defect Effects 0.000 title claims abstract description 26
- 238000000034 method Methods 0.000 title description 7
- 238000001514 detection method Methods 0.000 claims description 15
- 238000007689 inspection Methods 0.000 claims description 4
- 238000006073 displacement reaction Methods 0.000 claims 1
- 230000014509 gene expression Effects 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 10
- 238000000605 extraction Methods 0.000 description 8
- 230000002950 deficient Effects 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 4
- 238000003909 pattern recognition Methods 0.000 description 2
- 230000004069 differentiation Effects 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000003384 imaging method Methods 0.000 description 1
- 238000003672 processing method Methods 0.000 description 1
Landscapes
- Image Processing (AREA)
- Image Analysis (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59278912A JPS61150080A (ja) | 1984-12-25 | 1984-12-25 | 欠陥検出方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP59278912A JPS61150080A (ja) | 1984-12-25 | 1984-12-25 | 欠陥検出方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61150080A true JPS61150080A (ja) | 1986-07-08 |
JPH0410666B2 JPH0410666B2 (enrdf_load_stackoverflow) | 1992-02-26 |
Family
ID=17603821
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP59278912A Granted JPS61150080A (ja) | 1984-12-25 | 1984-12-25 | 欠陥検出方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61150080A (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006153502A (ja) * | 2004-11-25 | 2006-06-15 | Toshiba Corp | 紙葉類検査装置および紙葉類検査方法 |
-
1984
- 1984-12-25 JP JP59278912A patent/JPS61150080A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006153502A (ja) * | 2004-11-25 | 2006-06-15 | Toshiba Corp | 紙葉類検査装置および紙葉類検査方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0410666B2 (enrdf_load_stackoverflow) | 1992-02-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |