JPS61149978U - - Google Patents

Info

Publication number
JPS61149978U
JPS61149978U JP3451485U JP3451485U JPS61149978U JP S61149978 U JPS61149978 U JP S61149978U JP 3451485 U JP3451485 U JP 3451485U JP 3451485 U JP3451485 U JP 3451485U JP S61149978 U JPS61149978 U JP S61149978U
Authority
JP
Japan
Prior art keywords
inductor
groove
permanent magnet
iron plate
attached
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP3451485U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP3451485U priority Critical patent/JPS61149978U/ja
Publication of JPS61149978U publication Critical patent/JPS61149978U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Linear Motors (AREA)
JP3451485U 1985-03-11 1985-03-11 Pending JPS61149978U (US06724976-20040420-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP3451485U JPS61149978U (US06724976-20040420-M00002.png) 1985-03-11 1985-03-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP3451485U JPS61149978U (US06724976-20040420-M00002.png) 1985-03-11 1985-03-11

Publications (1)

Publication Number Publication Date
JPS61149978U true JPS61149978U (US06724976-20040420-M00002.png) 1986-09-16

Family

ID=30537954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP3451485U Pending JPS61149978U (US06724976-20040420-M00002.png) 1985-03-11 1985-03-11

Country Status (1)

Country Link
JP (1) JPS61149978U (US06724976-20040420-M00002.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190114817A (ko) * 2018-03-30 2019-10-10 캐논 가부시끼가이샤 스테이지 구동 장치, 리소그래피 장치, 및 물품 제조 방법

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20190114817A (ko) * 2018-03-30 2019-10-10 캐논 가부시끼가이샤 스테이지 구동 장치, 리소그래피 장치, 및 물품 제조 방법
US11543745B2 (en) 2018-03-30 2023-01-03 Canon Kabushiki Kaisha Stage driving apparatus, lithography apparatus, and method of manufacturing article

Similar Documents

Publication Publication Date Title
JPS61149978U (US06724976-20040420-M00002.png)
JPH0230270U (US06724976-20040420-M00002.png)
JPS5866874U (ja) パルスモ−タ
JPH0169381U (US06724976-20040420-M00002.png)
JPS63191878U (US06724976-20040420-M00002.png)
JPS61129474U (US06724976-20040420-M00002.png)
JPS6445450U (US06724976-20040420-M00002.png)
JPS62152674U (US06724976-20040420-M00002.png)
JPS59159185U (ja) リニアパルスモ−タ
JPH0339377U (US06724976-20040420-M00002.png)
JPS63182676U (US06724976-20040420-M00002.png)
JPS6355778U (US06724976-20040420-M00002.png)
JPS59179482U (ja) 可動コイル型リニアモ−タ
JPS6278078U (US06724976-20040420-M00002.png)
JPS6393772U (US06724976-20040420-M00002.png)
JPH0363073U (US06724976-20040420-M00002.png)
JPS624876U (US06724976-20040420-M00002.png)
JPH01171586U (US06724976-20040420-M00002.png)
JPS6390971U (US06724976-20040420-M00002.png)
JPS59129379U (ja) 永久磁石界磁電動機
JPS6011670U (ja) ホ−ルモ−タ
JPS62152408U (US06724976-20040420-M00002.png)
JPS61113582U (US06724976-20040420-M00002.png)
JPS6437369U (US06724976-20040420-M00002.png)
JPS60114581U (ja) ボイスコイルモ−タ