JPS61147261U - - Google Patents
Info
- Publication number
- JPS61147261U JPS61147261U JP3164785U JP3164785U JPS61147261U JP S61147261 U JPS61147261 U JP S61147261U JP 3164785 U JP3164785 U JP 3164785U JP 3164785 U JP3164785 U JP 3164785U JP S61147261 U JPS61147261 U JP S61147261U
- Authority
- JP
- Japan
- Prior art keywords
- vapor
- vapor deposition
- shielding member
- deposition apparatus
- ionizes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 2
- 239000000463 material Substances 0.000 claims 4
- 238000007740 vapor deposition Methods 0.000 claims 4
- 239000000155 melt Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3164785U JPS61147261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-03-04 | 1985-03-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3164785U JPS61147261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-03-04 | 1985-03-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61147261U true JPS61147261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1986-09-11 |
Family
ID=30532435
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3164785U Pending JPS61147261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1985-03-04 | 1985-03-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61147261U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
-
1985
- 1985-03-04 JP JP3164785U patent/JPS61147261U/ja active Pending
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