JPS61146016U - - Google Patents

Info

Publication number

JPS61146016U

JPS61146016U JP2863785U JP2863785U JPS61146016U JP S61146016 U JPS61146016 U JP S61146016U JP 2863785 U JP2863785 U JP 2863785U JP 2863785 U JP2863785 U JP 2863785U JP S61146016 U JPS61146016 U JP S61146016U

Authority

JP

Japan

Prior art keywords

vapor deposition

crystal piece

deposition mask

held

adjustment window

Prior art date

1985-02-28

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007740 vapor deposition Methods 0.000 claims description 11
• 239000013078 crystal Substances 0.000 claims description 8
• 239000000126 substance Substances 0.000 claims description 2
• 230000005284 excitation Effects 0.000 description 2
• 239000000463 material Substances 0.000 description 1

Cited By (1)