JPS61142776A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS61142776A
JPS61142776A JP59265033A JP26503384A JPS61142776A JP S61142776 A JPS61142776 A JP S61142776A JP 59265033 A JP59265033 A JP 59265033A JP 26503384 A JP26503384 A JP 26503384A JP S61142776 A JPS61142776 A JP S61142776A
Authority
JP
Japan
Prior art keywords
region
insulating film
etching
gate
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59265033A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0217933B2 (enrdf_load_stackoverflow
Inventor
Koji Tomita
孝司 富田
Tatsuya Yamashita
山下　達哉
Mitsunori Yoshikawa
吉川　光憲
Masaya Isobe
雅哉 磯部
Jiyunkou Takagi
悛公 高木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP59265033A priority Critical patent/JPS61142776A/ja
Publication of JPS61142776A publication Critical patent/JPS61142776A/ja
Publication of JPH0217933B2 publication Critical patent/JPH0217933B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/80—FETs having rectifying junction gate electrodes
    • H10D30/87—FETs having Schottky gate electrodes, e.g. metal-semiconductor FETs [MESFET]

Landscapes

  • Drying Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP59265033A 1984-12-14 1984-12-14 半導体装置の製造方法 Granted JPS61142776A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59265033A JPS61142776A (ja) 1984-12-14 1984-12-14 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59265033A JPS61142776A (ja) 1984-12-14 1984-12-14 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61142776A true JPS61142776A (ja) 1986-06-30
JPH0217933B2 JPH0217933B2 (enrdf_load_stackoverflow) 1990-04-24

Family

ID=17411652

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59265033A Granted JPS61142776A (ja) 1984-12-14 1984-12-14 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61142776A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0217933B2 (enrdf_load_stackoverflow) 1990-04-24

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