JPS61141587U - - Google Patents

Info

Publication number
JPS61141587U
JPS61141587U JP2498385U JP2498385U JPS61141587U JP S61141587 U JPS61141587 U JP S61141587U JP 2498385 U JP2498385 U JP 2498385U JP 2498385 U JP2498385 U JP 2498385U JP S61141587 U JPS61141587 U JP S61141587U
Authority
JP
Japan
Prior art keywords
shelf
heat exchange
main body
utility
model registration
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2498385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0129434Y2 (US06653308-20031125-C00197.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2498385U priority Critical patent/JPH0129434Y2/ja
Publication of JPS61141587U publication Critical patent/JPS61141587U/ja
Application granted granted Critical
Publication of JPH0129434Y2 publication Critical patent/JPH0129434Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Heat-Exchange And Heat-Transfer (AREA)
JP2498385U 1985-02-23 1985-02-23 Expired JPH0129434Y2 (US06653308-20031125-C00197.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2498385U JPH0129434Y2 (US06653308-20031125-C00197.png) 1985-02-23 1985-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2498385U JPH0129434Y2 (US06653308-20031125-C00197.png) 1985-02-23 1985-02-23

Publications (2)

Publication Number Publication Date
JPS61141587U true JPS61141587U (US06653308-20031125-C00197.png) 1986-09-01
JPH0129434Y2 JPH0129434Y2 (US06653308-20031125-C00197.png) 1989-09-07

Family

ID=30519643

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2498385U Expired JPH0129434Y2 (US06653308-20031125-C00197.png) 1985-02-23 1985-02-23

Country Status (1)

Country Link
JP (1) JPH0129434Y2 (US06653308-20031125-C00197.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001035902A (ja) * 1999-07-26 2001-02-09 Jel:Kk 基板搬送用ロボット

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001035902A (ja) * 1999-07-26 2001-02-09 Jel:Kk 基板搬送用ロボット

Also Published As

Publication number Publication date
JPH0129434Y2 (US06653308-20031125-C00197.png) 1989-09-07

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