JPS61138929U - - Google Patents

Info

Publication number

JPS61138929U

JPS61138929U JP2214185U JP2214185U JPS61138929U JP S61138929 U JPS61138929 U JP S61138929U JP 2214185 U JP2214185 U JP 2214185U JP 2214185 U JP2214185 U JP 2214185U JP S61138929 U JPS61138929 U JP S61138929U

Authority

JP

Japan

Prior art keywords

ventilation

output

emitting

detecting

integrating

Prior art date

1985-02-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000009423 ventilation Methods 0.000 claims description 11
• 238000001514 detection method Methods 0.000 claims 3
• 238000005070 sampling Methods 0.000 claims 3
• 238000011109 contamination Methods 0.000 claims 1
• 230000010354 integration Effects 0.000 claims 1
• 229910044991 metal oxide Inorganic materials 0.000 claims 1
• 150000004706 metal oxides Chemical class 0.000 claims 1
• 230000004044 response Effects 0.000 claims 1
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 3