JPS61137369U - - Google Patents

Info

Publication number

JPS61137369U

JPS61137369U JP2210385U JP2210385U JPS61137369U JP S61137369 U JPS61137369 U JP S61137369U JP 2210385 U JP2210385 U JP 2210385U JP 2210385 U JP2210385 U JP 2210385U JP S61137369 U JPS61137369 U JP S61137369U

Authority

JP

Japan

Prior art keywords

guide rail

chamber

side wall

washing

cleaning chamber

Prior art date

1985-02-19

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000004140 cleaning Methods 0.000 claims description 3
• 238000005406 washing Methods 0.000 claims 3
• 239000007921 spray Substances 0.000 claims 2
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 2
• 238000002347 injection Methods 0.000 description 1
• 239000007924 injection Substances 0.000 description 1

Cited By (1)