JPS61136291U - - Google Patents

Info

Publication number

JPS61136291U

JPS61136291U JP1907285U JP1907285U JPS61136291U JP S61136291 U JPS61136291 U JP S61136291U JP 1907285 U JP1907285 U JP 1907285U JP 1907285 U JP1907285 U JP 1907285U JP S61136291 U JPS61136291 U JP S61136291U

Authority

JP

Japan

Prior art keywords

cooler

cooling device

fan

spray nozzle

hepa filter

Prior art date

1985-02-15

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001816 cooling Methods 0.000 claims description 5
• 239000007921 spray Substances 0.000 claims description 2
• 238000005507 spraying Methods 0.000 claims 1
• 238000011144 upstream manufacturing Methods 0.000 claims 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)