JPS61133558U - - Google Patents

Info

Publication number
JPS61133558U
JPS61133558U JP1749285U JP1749285U JPS61133558U JP S61133558 U JPS61133558 U JP S61133558U JP 1749285 U JP1749285 U JP 1749285U JP 1749285 U JP1749285 U JP 1749285U JP S61133558 U JPS61133558 U JP S61133558U
Authority
JP
Japan
Prior art keywords
filament
hole
vacuum chamber
metal vapor
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1749285U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0342034Y2 (US07321065-20080122-C00160.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1749285U priority Critical patent/JPH0342034Y2/ja
Publication of JPS61133558U publication Critical patent/JPS61133558U/ja
Application granted granted Critical
Publication of JPH0342034Y2 publication Critical patent/JPH0342034Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1749285U 1985-02-08 1985-02-08 Expired JPH0342034Y2 (US07321065-20080122-C00160.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1749285U JPH0342034Y2 (US07321065-20080122-C00160.png) 1985-02-08 1985-02-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1749285U JPH0342034Y2 (US07321065-20080122-C00160.png) 1985-02-08 1985-02-08

Publications (2)

Publication Number Publication Date
JPS61133558U true JPS61133558U (US07321065-20080122-C00160.png) 1986-08-20
JPH0342034Y2 JPH0342034Y2 (US07321065-20080122-C00160.png) 1991-09-03

Family

ID=30505245

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1749285U Expired JPH0342034Y2 (US07321065-20080122-C00160.png) 1985-02-08 1985-02-08

Country Status (1)

Country Link
JP (1) JPH0342034Y2 (US07321065-20080122-C00160.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03107452A (ja) * 1989-09-08 1991-05-07 Internatl Business Mach Corp <Ibm> 気相付着装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03107452A (ja) * 1989-09-08 1991-05-07 Internatl Business Mach Corp <Ibm> 気相付着装置

Also Published As

Publication number Publication date
JPH0342034Y2 (US07321065-20080122-C00160.png) 1991-09-03

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