JPS61132741U - - Google Patents

Info

Publication number

JPS61132741U

JPS61132741U JP1581985U JP1581985U JPS61132741U JP S61132741 U JPS61132741 U JP S61132741U JP 1581985 U JP1581985 U JP 1581985U JP 1581985 U JP1581985 U JP 1581985U JP S61132741 U JPS61132741 U JP S61132741U

Authority

JP

Japan

Prior art keywords

atmosphere

heater

dust

constant

receives

Prior art date

1985-02-08

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000000428 dust Substances 0.000 claims description 4
• 230000020169 heat generation Effects 0.000 claims 1
• 239000002184 metal Substances 0.000 claims 1
• 229910044991 metal oxide Inorganic materials 0.000 claims 1
• 150000004706 metal oxides Chemical class 0.000 claims 1
• 229910021332 silicide Inorganic materials 0.000 claims 1
• FVBUAEGBCNSCDD-UHFFFAOYSA-N silicide(4-) Chemical compound [Si-4] FVBUAEGBCNSCDD-UHFFFAOYSA-N 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 1

Cited By (1)