JPS61131263U - - Google Patents

Info

Publication number
JPS61131263U
JPS61131263U JP1559785U JP1559785U JPS61131263U JP S61131263 U JPS61131263 U JP S61131263U JP 1559785 U JP1559785 U JP 1559785U JP 1559785 U JP1559785 U JP 1559785U JP S61131263 U JPS61131263 U JP S61131263U
Authority
JP
Japan
Prior art keywords
substrate
center
centers
movable table
rotating shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1559785U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1559785U priority Critical patent/JPS61131263U/ja
Publication of JPS61131263U publication Critical patent/JPS61131263U/ja
Pending legal-status Critical Current

Links

JP1559785U 1985-02-06 1985-02-06 Pending JPS61131263U (US06420036-20020716-C00037.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1559785U JPS61131263U (US06420036-20020716-C00037.png) 1985-02-06 1985-02-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1559785U JPS61131263U (US06420036-20020716-C00037.png) 1985-02-06 1985-02-06

Publications (1)

Publication Number Publication Date
JPS61131263U true JPS61131263U (US06420036-20020716-C00037.png) 1986-08-16

Family

ID=30501580

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1559785U Pending JPS61131263U (US06420036-20020716-C00037.png) 1985-02-06 1985-02-06

Country Status (1)

Country Link
JP (1) JPS61131263U (US06420036-20020716-C00037.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6397447U (US06420036-20020716-C00037.png) * 1986-12-16 1988-06-23

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6397447U (US06420036-20020716-C00037.png) * 1986-12-16 1988-06-23

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