JPS61126090A - リン酸モノエステルの製造方法 - Google Patents
リン酸モノエステルの製造方法Info
- Publication number
- JPS61126090A JPS61126090A JP24642484A JP24642484A JPS61126090A JP S61126090 A JPS61126090 A JP S61126090A JP 24642484 A JP24642484 A JP 24642484A JP 24642484 A JP24642484 A JP 24642484A JP S61126090 A JPS61126090 A JP S61126090A
- Authority
- JP
- Japan
- Prior art keywords
- phosphoric anhydride
- monoester
- phosphoric
- hydroxy compound
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims 2
- DLYUQMMRRRQYAE-UHFFFAOYSA-N tetraphosphorus decaoxide Chemical compound O1P(O2)(=O)OP3(=O)OP1(=O)OP2(=O)O3 DLYUQMMRRRQYAE-UHFFFAOYSA-N 0.000 claims abstract 8
- 230000000865 phosphorylative effect Effects 0.000 claims abstract 4
- 239000007795 chemical reaction product Substances 0.000 claims abstract 3
- 239000003795 chemical substances by application Substances 0.000 claims abstract 3
- 150000002440 hydroxy compounds Chemical class 0.000 claims abstract 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 claims 2
- 229910000147 aluminium phosphate Inorganic materials 0.000 claims 1
- KBPLFHHGFOOTCA-UHFFFAOYSA-N 1-Octanol Chemical compound CCCCCCCCO KBPLFHHGFOOTCA-UHFFFAOYSA-N 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- LQZZUXJYWNFBMV-UHFFFAOYSA-N dodecan-1-ol Chemical compound CCCCCCCCCCCCO LQZZUXJYWNFBMV-UHFFFAOYSA-N 0.000 abstract 2
- DNIAPMSPPWPWGF-GSVOUGTGSA-N (R)-(-)-Propylene glycol Chemical compound C[C@@H](O)CO DNIAPMSPPWPWGF-GSVOUGTGSA-N 0.000 abstract 1
- WVDDGKGOMKODPV-UHFFFAOYSA-N Benzyl alcohol Chemical compound OCC1=CC=CC=C1 WVDDGKGOMKODPV-UHFFFAOYSA-N 0.000 abstract 1
- WVDDGKGOMKODPV-ZQBYOMGUSA-N phenyl(114C)methanol Chemical compound O[14CH2]C1=CC=CC=C1 WVDDGKGOMKODPV-ZQBYOMGUSA-N 0.000 abstract 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24642484A JPS61126090A (ja) | 1984-11-21 | 1984-11-21 | リン酸モノエステルの製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24642484A JPS61126090A (ja) | 1984-11-21 | 1984-11-21 | リン酸モノエステルの製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61126090A true JPS61126090A (ja) | 1986-06-13 |
| JPH0242837B2 JPH0242837B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-09-26 |
Family
ID=17148270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24642484A Granted JPS61126090A (ja) | 1984-11-21 | 1984-11-21 | リン酸モノエステルの製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61126090A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016029717A (ja) * | 2014-07-17 | 2016-03-03 | ソウルブレイン シーオー．， エルティーディー． | エッチング用組成物及びこれを用いた半導体素子の製造方法 |
-
1984
- 1984-11-21 JP JP24642484A patent/JPS61126090A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016029717A (ja) * | 2014-07-17 | 2016-03-03 | ソウルブレイン シーオー．， エルティーディー． | エッチング用組成物及びこれを用いた半導体素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0242837B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-09-26 |
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