JPS61125045U - - Google Patents

Info

Publication number

JPS61125045U

JPS61125045U JP819685U JP819685U JPS61125045U JP S61125045 U JPS61125045 U JP S61125045U JP 819685 U JP819685 U JP 819685U JP 819685 U JP819685 U JP 819685U JP S61125045 U JPS61125045 U JP S61125045U

Authority

JP

Japan

Prior art keywords

suction table

semiconductor manufacturing

manufacturing device

cleaning

semiconductor wafer

Prior art date

1985-01-23

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 5
• 239000007921 spray Substances 0.000 claims description 3
• 238000001035 drying Methods 0.000 claims description 2
• 238000004519 manufacturing process Methods 0.000 claims 2
• 238000004140 cleaning Methods 0.000 claims 1
• 239000011261 inert gas Substances 0.000 description 2
• 238000005201 scrubbing Methods 0.000 description 2
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
• 229910001873 dinitrogen Inorganic materials 0.000 description 1
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1

Cited By (1)