JPS61124764U - - Google Patents

Info

Publication number

JPS61124764U

JPS61124764U JP870385U JP870385U JPS61124764U JP S61124764 U JPS61124764 U JP S61124764U JP 870385 U JP870385 U JP 870385U JP 870385 U JP870385 U JP 870385U JP S61124764 U JPS61124764 U JP S61124764U

Authority

JP

Japan

Prior art keywords

silicon wafer

wafer substrate

diaphragm sheet

concave portion

utility

Prior art date

1985-01-25

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 4
• 229910052710 silicon Inorganic materials 0.000 claims description 4
• 239000010703 silicon Substances 0.000 claims description 4
• 239000000758 substrate Substances 0.000 claims description 4
• 230000014759 maintenance of location Effects 0.000 description 1