JPS61121371A - 光導電素子の製造方法 - Google Patents

光導電素子の製造方法

Info

Publication number
JPS61121371A
JPS61121371A JP59242923A JP24292384A JPS61121371A JP S61121371 A JPS61121371 A JP S61121371A JP 59242923 A JP59242923 A JP 59242923A JP 24292384 A JP24292384 A JP 24292384A JP S61121371 A JPS61121371 A JP S61121371A
Authority
JP
Japan
Prior art keywords
vacuum
manufacturing
heat treatment
photoconductive element
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59242923A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510833B2 (https=
Inventor
Hiroko Wada
裕子 和田
Kosuke Ikeda
光佑 池田
Noboru Yoshigami
由上　登
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP59242923A priority Critical patent/JPS61121371A/ja
Publication of JPS61121371A publication Critical patent/JPS61121371A/ja
Publication of JPH0510833B2 publication Critical patent/JPH0510833B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F77/00—Constructional details of devices covered by this subclass
    • H10F77/10—Semiconductor bodies
    • H10F77/12—Active materials
    • H10F77/123—Active materials comprising only Group II-VI materials, e.g. CdS, ZnS or HgCdTe

Landscapes

  • Light Receiving Elements (AREA)
JP59242923A 1984-11-16 1984-11-16 光導電素子の製造方法 Granted JPS61121371A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59242923A JPS61121371A (ja) 1984-11-16 1984-11-16 光導電素子の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59242923A JPS61121371A (ja) 1984-11-16 1984-11-16 光導電素子の製造方法

Publications (2)

Publication Number Publication Date
JPS61121371A true JPS61121371A (ja) 1986-06-09
JPH0510833B2 JPH0510833B2 (https=) 1993-02-10

Family

ID=17096217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59242923A Granted JPS61121371A (ja) 1984-11-16 1984-11-16 光導電素子の製造方法

Country Status (1)

Country Link
JP (1) JPS61121371A (https=)

Also Published As

Publication number Publication date
JPH0510833B2 (https=) 1993-02-10

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