JPS61120760U - - Google Patents

Info

Publication number

JPS61120760U

JPS61120760U JP361085U JP361085U JPS61120760U JP S61120760 U JPS61120760 U JP S61120760U JP 361085 U JP361085 U JP 361085U JP 361085 U JP361085 U JP 361085U JP S61120760 U JPS61120760 U JP S61120760U

Authority

JP

Japan

Prior art keywords

vacuum container

sample

vacuum

evaporation apparatus

light

Prior art date

1985-01-17

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000007738 vacuum evaporation Methods 0.000 claims description 3
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 2
• 229910052799 carbon Inorganic materials 0.000 claims description 2
• 239000011521 glass Substances 0.000 claims description 2
• 239000002184 metal Substances 0.000 claims description 2
• 238000000151 deposition Methods 0.000 claims 1