JPS61120758U - - Google Patents

Info

Publication number
JPS61120758U
JPS61120758U JP402085U JP402085U JPS61120758U JP S61120758 U JPS61120758 U JP S61120758U JP 402085 U JP402085 U JP 402085U JP 402085 U JP402085 U JP 402085U JP S61120758 U JPS61120758 U JP S61120758U
Authority
JP
Japan
Prior art keywords
target
packing plate
view
utility
integrally formed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP402085U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP402085U priority Critical patent/JPS61120758U/ja
Publication of JPS61120758U publication Critical patent/JPS61120758U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Manufacturing Optical Record Carriers (AREA)
JP402085U 1985-01-16 1985-01-16 Pending JPS61120758U (US08124317-20120228-C00060.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP402085U JPS61120758U (US08124317-20120228-C00060.png) 1985-01-16 1985-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP402085U JPS61120758U (US08124317-20120228-C00060.png) 1985-01-16 1985-01-16

Publications (1)

Publication Number Publication Date
JPS61120758U true JPS61120758U (US08124317-20120228-C00060.png) 1986-07-30

Family

ID=30479190

Family Applications (1)

Application Number Title Priority Date Filing Date
JP402085U Pending JPS61120758U (US08124317-20120228-C00060.png) 1985-01-16 1985-01-16

Country Status (1)

Country Link
JP (1) JPS61120758U (US08124317-20120228-C00060.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006503984A (ja) * 2002-10-24 2006-02-02 ハネウエル・インターナシヨナル・インコーポレーテツド 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法
USRE41266E1 (en) 1990-09-18 2010-04-27 Lam Research Corporation Composite electrode for plasma processes

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE41266E1 (en) 1990-09-18 2010-04-27 Lam Research Corporation Composite electrode for plasma processes
JP2006503984A (ja) * 2002-10-24 2006-02-02 ハネウエル・インターナシヨナル・インコーポレーテツド 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法
JP2011052325A (ja) * 2002-10-24 2011-03-17 Honeywell Internatl Inc 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法
JP2014051746A (ja) * 2002-10-24 2014-03-20 Honeywell Internatl Inc 冷却能を向上させると共に撓みおよび変形を減少させるターゲットの設計およびその関連方法

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