JPS61120434U - - Google Patents

Info

Publication number
JPS61120434U
JPS61120434U JP466885U JP466885U JPS61120434U JP S61120434 U JPS61120434 U JP S61120434U JP 466885 U JP466885 U JP 466885U JP 466885 U JP466885 U JP 466885U JP S61120434 U JPS61120434 U JP S61120434U
Authority
JP
Japan
Prior art keywords
chuck
electrostatic chuck
opens
electrostatic
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP466885U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP466885U priority Critical patent/JPS61120434U/ja
Publication of JPS61120434U publication Critical patent/JPS61120434U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Jigs For Machine Tools (AREA)
JP466885U 1985-01-17 1985-01-17 Pending JPS61120434U (US07166745-20070123-C00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP466885U JPS61120434U (US07166745-20070123-C00016.png) 1985-01-17 1985-01-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP466885U JPS61120434U (US07166745-20070123-C00016.png) 1985-01-17 1985-01-17

Publications (1)

Publication Number Publication Date
JPS61120434U true JPS61120434U (US07166745-20070123-C00016.png) 1986-07-29

Family

ID=30480460

Family Applications (1)

Application Number Title Priority Date Filing Date
JP466885U Pending JPS61120434U (US07166745-20070123-C00016.png) 1985-01-17 1985-01-17

Country Status (1)

Country Link
JP (1) JPS61120434U (US07166745-20070123-C00016.png)

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