JPS61115550U - - Google Patents

Info

Publication number
JPS61115550U
JPS61115550U JP19735484U JP19735484U JPS61115550U JP S61115550 U JPS61115550 U JP S61115550U JP 19735484 U JP19735484 U JP 19735484U JP 19735484 U JP19735484 U JP 19735484U JP S61115550 U JPS61115550 U JP S61115550U
Authority
JP
Japan
Prior art keywords
vaporization chamber
tank
chemical
chemical solution
solution tank
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP19735484U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0140525Y2 (US06168776-20010102-C00028.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19735484U priority Critical patent/JPH0140525Y2/ja
Publication of JPS61115550U publication Critical patent/JPS61115550U/ja
Application granted granted Critical
Publication of JPH0140525Y2 publication Critical patent/JPH0140525Y2/ja
Expired legal-status Critical Current

Links

JP19735484U 1984-12-31 1984-12-31 Expired JPH0140525Y2 (US06168776-20010102-C00028.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19735484U JPH0140525Y2 (US06168776-20010102-C00028.png) 1984-12-31 1984-12-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19735484U JPH0140525Y2 (US06168776-20010102-C00028.png) 1984-12-31 1984-12-31

Publications (2)

Publication Number Publication Date
JPS61115550U true JPS61115550U (US06168776-20010102-C00028.png) 1986-07-21
JPH0140525Y2 JPH0140525Y2 (US06168776-20010102-C00028.png) 1989-12-04

Family

ID=30755603

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19735484U Expired JPH0140525Y2 (US06168776-20010102-C00028.png) 1984-12-31 1984-12-31

Country Status (1)

Country Link
JP (1) JPH0140525Y2 (US06168776-20010102-C00028.png)

Also Published As

Publication number Publication date
JPH0140525Y2 (US06168776-20010102-C00028.png) 1989-12-04

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