JPS61114840U - - Google Patents

Info

Publication number
JPS61114840U
JPS61114840U JP19799384U JP19799384U JPS61114840U JP S61114840 U JPS61114840 U JP S61114840U JP 19799384 U JP19799384 U JP 19799384U JP 19799384 U JP19799384 U JP 19799384U JP S61114840 U JPS61114840 U JP S61114840U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
wafer holder
semiconductor
heating means
vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19799384U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19799384U priority Critical patent/JPS61114840U/ja
Publication of JPS61114840U publication Critical patent/JPS61114840U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Feeding Of Workpieces (AREA)
JP19799384U 1984-12-28 1984-12-28 Pending JPS61114840U (US06272168-20010807-M00014.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19799384U JPS61114840U (US06272168-20010807-M00014.png) 1984-12-28 1984-12-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19799384U JPS61114840U (US06272168-20010807-M00014.png) 1984-12-28 1984-12-28

Publications (1)

Publication Number Publication Date
JPS61114840U true JPS61114840U (US06272168-20010807-M00014.png) 1986-07-19

Family

ID=30756609

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19799384U Pending JPS61114840U (US06272168-20010807-M00014.png) 1984-12-28 1984-12-28

Country Status (1)

Country Link
JP (1) JPS61114840U (US06272168-20010807-M00014.png)

Similar Documents

Publication Publication Date Title
JPS61114840U (US06272168-20010807-M00014.png)
JPS61114839U (US06272168-20010807-M00014.png)
JPS63177035U (US06272168-20010807-M00014.png)
JPH0366929U (US06272168-20010807-M00014.png)
JPH0369232U (US06272168-20010807-M00014.png)
JPH0195766U (US06272168-20010807-M00014.png)
JPH0415844U (US06272168-20010807-M00014.png)
JPS61199049U (US06272168-20010807-M00014.png)
JPH0256442U (US06272168-20010807-M00014.png)
JPS62109453U (US06272168-20010807-M00014.png)
JPS6336048U (US06272168-20010807-M00014.png)
JPS61171247U (US06272168-20010807-M00014.png)
JPH0485731U (US06272168-20010807-M00014.png)
JPS62151728U (US06272168-20010807-M00014.png)
JPH0251059U (US06272168-20010807-M00014.png)
JPS61125041U (US06272168-20010807-M00014.png)
JPH0312440U (US06272168-20010807-M00014.png)
JPS6217120U (US06272168-20010807-M00014.png)
JPS6377344U (US06272168-20010807-M00014.png)
JPS63102257U (US06272168-20010807-M00014.png)
JPH0320438U (US06272168-20010807-M00014.png)
JPS6289144U (US06272168-20010807-M00014.png)
JPS6312860U (US06272168-20010807-M00014.png)
JPS6281032U (US06272168-20010807-M00014.png)
JPS6394657U (US06272168-20010807-M00014.png)