JPS61114445U - - Google Patents

Info

Publication number
JPS61114445U
JPS61114445U JP1984198781U JP19878184U JPS61114445U JP S61114445 U JPS61114445 U JP S61114445U JP 1984198781 U JP1984198781 U JP 1984198781U JP 19878184 U JP19878184 U JP 19878184U JP S61114445 U JPS61114445 U JP S61114445U
Authority
JP
Japan
Prior art keywords
pellicle
mask
protecting
frame
pellicle frame
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1984198781U
Other languages
English (en)
Japanese (ja)
Other versions
JPS638899Y2 (US06229276-20010508-P00022.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984198781U priority Critical patent/JPS638899Y2/ja
Publication of JPS61114445U publication Critical patent/JPS61114445U/ja
Application granted granted Critical
Publication of JPS638899Y2 publication Critical patent/JPS638899Y2/ja
Expired legal-status Critical Current

Links

JP1984198781U 1984-12-27 1984-12-27 Expired JPS638899Y2 (US06229276-20010508-P00022.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984198781U JPS638899Y2 (US06229276-20010508-P00022.png) 1984-12-27 1984-12-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984198781U JPS638899Y2 (US06229276-20010508-P00022.png) 1984-12-27 1984-12-27

Publications (2)

Publication Number Publication Date
JPS61114445U true JPS61114445U (US06229276-20010508-P00022.png) 1986-07-19
JPS638899Y2 JPS638899Y2 (US06229276-20010508-P00022.png) 1988-03-16

Family

ID=30758093

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984198781U Expired JPS638899Y2 (US06229276-20010508-P00022.png) 1984-12-27 1984-12-27

Country Status (1)

Country Link
JP (1) JPS638899Y2 (US06229276-20010508-P00022.png)

Also Published As

Publication number Publication date
JPS638899Y2 (US06229276-20010508-P00022.png) 1988-03-16

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