JPS61111151U - - Google Patents

Info

Publication number
JPS61111151U
JPS61111151U JP20067184U JP20067184U JPS61111151U JP S61111151 U JPS61111151 U JP S61111151U JP 20067184 U JP20067184 U JP 20067184U JP 20067184 U JP20067184 U JP 20067184U JP S61111151 U JPS61111151 U JP S61111151U
Authority
JP
Japan
Prior art keywords
wafer
resist
solvent
nozzle
onto
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20067184U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP20067184U priority Critical patent/JPS61111151U/ja
Publication of JPS61111151U publication Critical patent/JPS61111151U/ja
Pending legal-status Critical Current

Links

JP20067184U 1984-12-25 1984-12-25 Pending JPS61111151U (US20100223739A1-20100909-C00005.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20067184U JPS61111151U (US20100223739A1-20100909-C00005.png) 1984-12-25 1984-12-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20067184U JPS61111151U (US20100223739A1-20100909-C00005.png) 1984-12-25 1984-12-25

Publications (1)

Publication Number Publication Date
JPS61111151U true JPS61111151U (US20100223739A1-20100909-C00005.png) 1986-07-14

Family

ID=30761739

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20067184U Pending JPS61111151U (US20100223739A1-20100909-C00005.png) 1984-12-25 1984-12-25

Country Status (1)

Country Link
JP (1) JPS61111151U (US20100223739A1-20100909-C00005.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5555206A (en) * 1978-10-20 1980-04-23 Hitachi Electronics Eng Co Ltd Inspection data processing system for defect on face plate

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