JPS61110147U - - Google Patents

Info

Publication number

JPS61110147U

JPS61110147U JP20008684U JP20008684U JPS61110147U JP S61110147 U JPS61110147 U JP S61110147U JP 20008684 U JP20008684 U JP 20008684U JP 20008684 U JP20008684 U JP 20008684U JP S61110147 U JPS61110147 U JP S61110147U

Authority

JP

Japan

Prior art keywords

gas

sensitive surface

detection sensor

gas inlet

component measuring

Prior art date

1984-12-24

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Granted

Links

• Espacenet
• Global Dossier
• Discuss

• 230000000903 blocking effect Effects 0.000 claims description 3
• 238000001514 detection method Methods 0.000 claims 2
• 238000010586 diagram Methods 0.000 description 2
• 238000005259 measurement Methods 0.000 description 2
• 239000012528 membrane Substances 0.000 description 1
• 239000002184 metal Substances 0.000 description 1
• 230000010355 oscillation Effects 0.000 description 1
• 229910001220 stainless steel Inorganic materials 0.000 description 1
• 239000010935 stainless steel Substances 0.000 description 1
• 239000011800 void material Substances 0.000 description 1