JPS61109135U - - Google Patents

Info

Publication number
JPS61109135U
JPS61109135U JP19492884U JP19492884U JPS61109135U JP S61109135 U JPS61109135 U JP S61109135U JP 19492884 U JP19492884 U JP 19492884U JP 19492884 U JP19492884 U JP 19492884U JP S61109135 U JPS61109135 U JP S61109135U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
outer periphery
rotating body
rotates
contact
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19492884U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19492884U priority Critical patent/JPS61109135U/ja
Publication of JPS61109135U publication Critical patent/JPS61109135U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP19492884U 1984-12-21 1984-12-21 Pending JPS61109135U (US20020095090A1-20020718-M00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19492884U JPS61109135U (US20020095090A1-20020718-M00002.png) 1984-12-21 1984-12-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19492884U JPS61109135U (US20020095090A1-20020718-M00002.png) 1984-12-21 1984-12-21

Publications (1)

Publication Number Publication Date
JPS61109135U true JPS61109135U (US20020095090A1-20020718-M00002.png) 1986-07-10

Family

ID=30752408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19492884U Pending JPS61109135U (US20020095090A1-20020718-M00002.png) 1984-12-21 1984-12-21

Country Status (1)

Country Link
JP (1) JPS61109135U (US20020095090A1-20020718-M00002.png)

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