JPS61106051U - - Google Patents

Info

Publication number

JPS61106051U

JPS61106051U JP19191284U JP19191284U JPS61106051U JP S61106051 U JPS61106051 U JP S61106051U JP 19191284 U JP19191284 U JP 19191284U JP 19191284 U JP19191284 U JP 19191284U JP S61106051 U JPS61106051 U JP S61106051U

Authority

JP

Japan

Prior art keywords

view

figures

plan

explanatory diagram

present

Prior art date

1984-12-18

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000001514 detection method Methods 0.000 claims description 2
• 239000000758 substrate Substances 0.000 claims description 2
• 239000004065 semiconductor Substances 0.000 claims 1
• 238000010586 diagram Methods 0.000 description 5
• 238000009792 diffusion process Methods 0.000 description 1
• WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
• 230000001681 protective effect Effects 0.000 description 1